This comprehensive, standard work has been updated to remain an important resource for all those needing detailed knowledge of the theory and applications of vacuum technology. The text covers the existing knowledge on all aspects of vacuum science and technology, ranging from fundamentals to components and operating systems. It features many numerical examples and illustrations to help visualize the theoretical issues, while the chapters are carefully cross-linked and coherent symbols and notations are used throughout the book. The whole is rounded off by a user-friendly appendix of conversion tables, mathematical tools, material related data, overviews of processes and techniques, equipment-related data, national and international standards, guidelines, and much more. As a result, engineers, technicians, and scientists will be able to develop and work successfully with the equipment and environment found in a vacuum.

The approach taken in this book is to approach vacuum systems from a pressure regime viewpoint. That is, after covering some basic chemistry, the first pressure regime covered is the rough vacuum regime. Within the study of rough vacuum systems, the following topics are covered: the gas load, the pumping mechanism, pressure measurement and vacuum system construction. The discussion of rough vacuum is then followed by the study of high-vacuum systems. The same topics are revisited, but this time from a high vacuum perspective. Once both rough vacuum and high vacuum systems are covered, then the topics of leak detection and residual gas analysis are introduced. This approach lends itself to laboratory experimentation. During the review of gas laws from chemistry, there are a number of experiments and demonstrations that can be performed to reinforce basic laws and concepts. Then, during the study of rough vacuum systems, pumpdown times can be calculated and pumpdowns performed in the laboratory. Likewise, during the study of high-vacuum systems, pumpdowns as well as other lab exercises, such as outgassing and residual gas analysis, can be conducted. Coverage of vacuum systems from a pressure regime viewpoint, rather than from a topical viewpoint. Focus on the fundamental science behind vacumm system components. This book is written for users of vacuum systems, especially the technicians that are responsible for maintaining them.

In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.

Practical information about today's vacuum technology The purpose of this book is to help scientists, engineers and technicians learn about and better understand the vacuum technology found in science and industry today. It is written so that anyone, whether new to the art or an experienced practitioner, who wishes to learn about vacuum engineering can do so quickly and easily. It provides an undercut to the many classic texts that are still available today. Armed with the information contained within, the technologist will be able to go to the more advanced materials, if needed, and absorb that knowledge quickly and efficiently. This second edition contains the absolute latest technology, some not found in any vacuum technology book to date. It has updated information about pressure measurement, pumping and residual gas analysis. You will find information about the cutting edge research being done by NIST to develop quantum based standards. Understanding Modern Vacuum Technology explains concepts and methods by presenting the historical background of the development of the technology and how it has evolved into the technology we use today. It draws on historical papers and patents to show how the technology was conceived and then brings the topic up to modern times. In this way the reader will gain full conceptual understandings so that he or she will be able to then create sound vacuum solutions for the technical challenges that they face. A partial list of topics: Gas Laws Microscopic Description of a Gas Flows and Conductance Pressure Measurement Partial Pressure and Mass Analysis Vapor Pressure Photonic Pressure Measurement Flow Characteristics in Vacuum Rough Vacuum Pumps Diffusion Pumps Turbomolecular Pumps Cryopumps Ion Pumps Getter Pumps Calibrated Leaks Leaks and their Detection In order to learn more, visit www.ModernVacuumTechnology.com.

This third updated and enlarged edition includes about 350 new papers added to the previous list of references. The contents have been revised and updated in the areas of: Thermonuclear pumping; Throughput; Transmission probability; Electronic circuit simulation; Sorption on charcoal; Desorption from porous materials; Desorption from stainless steel, A1 alloys (outgassing rates); Ion bombardment (glow discharge) cleaning; Clay - type pumps; Turbomolecular pumps-improvements; Cryosorption; NEG (Nonevaporable getter) linear pumps; Standards for measurement of pumping speed (Recommended practice, test domes); Spinning rotor gauges; Quartz friction gauges; Increase of sensitivity of thermocouple gauges; Lubrication in vacuum; Calibration of diffusion leaks; Improvements in leak detection. Besides its role in educational activities, the book will also serve as a handbook for those working in this field, or in fields connected to Vacuum Technology.Comments from the press on the second edition:"A valuable reference work for undergraduate libraries...well organized and clearly written and strikes an appropriate balance between completeness and attention to fundamentals. The index and references are unusually complete. Recommended." (Choice) "Roth's new book contains a comprehensive collection of information on rarefied-gas flow, physical and chemical phenomena associated with vacuum technology, the production and measurement of high vacuum and sealing and leak-detection techniques. One finds a wealth of equations, numerical examples, tables, graphs and monographs. The book is more a handbook than a source book of latest developments. It is suitable for teaching, but the wealth of organized data should also make the book highly useful to engineers..." (Physics Today)

Vacuum technology is advancing and expanding so rapidly that a major difficulty for most companies in the field is finding qualified technicians needed for expansion and as replacements. The only recourse for most companies is to hire capable, though untrained, people to train them in-house. One of the problems in this course of action is that it repeatedly draws on the valuable time of experienced personnel to explain fundamental concepts to a trainee. - Provides a variety of exercises in eac

Offering a basic understanding of each important topic in vacuum science and technology, this book concentrates on pumping issues, emphasizes the behavior of vacuum pumps and vacuum systems, and explains the relationships between pumps, instrumentation and high-vacuum system performance. The book delineates the technical and theoretical aspects of the subject without getting in too deep. It leads readers through the subtleties of vacuum technology without using a dissertation on mathematics to get them there. An interesting blend of easy-to-understand technician-level information combined with engineering data and formulae, the book provides a non-analytical introduction to high vacuum technology.

Vacuum Technology and Applications reviews the most commonly encountered methods for the production, containment, and measurement of subatmospheric pressure. This book also outlines a number of very important applications of this technology. This text is organized into eight chapters and begins with a brief survey of the fundamental principles of vacuum technology. The succeeding chapters deal with the pumps used for the production of rough-medium and high-ultra-high vacua. These chapters specifically cover their principles, performance, and applications. These topics are followed by a discussion of the devices for residual gas analysis and partial pressure measurement. Other chapters consider the aspects of leak detection using He-specific mass spectrometer and the materials, components, and fabrication of vacuum devices. The final chapters explore the application of vacuum technology in critical areas of industrial activity, such as thin-film technology, semiconductor, metallurgy, and chemical industry. This book will prove useful to practicing mechanical, chemical, and design engineers.

Market: Scientists, engineers, and graduate students in vacuum technology. This volume presents numerous techniques developed in the early 1960s for the efficient construction of reliable vacuum seals, and provides critical insights into the design, construction, and assembly of vacuum systems. Extensively researched, this work covers a variety of sealing techniques and design concepts that remain as technologically relevant now as they were nearly three decades ago.