SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.

A selection of 81 papers on six major topics within the field of optical microelectromechanical systems (MEMS).

SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.

Due to their speed, data density, and versatility, optical metrology tools play important roles in today's high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods

Since the first edition of this book was published several new developments have been made in the field of the moiré theory. The most important of these concern new results that have recently been obtained on moiré effects between correlated aperiodic (or random) structures, a subject that was completely absent in the first edition, and which appears now for the first time in a second, separate volume. This also explains the change in the title of the present volume, which now includes the subtitle “Volume I: Periodic Layers”. This subtitle has been added to clearly distinguish the present volume from its new companion, which is subtitled “Volume II: Aperiodic Layers”. It should be noted, however, that the new subtitle of the present volume may be somewhat misleading, since this book also treats (in Chapters 10 and 11) moiré effects between repetitive layers, which are, in fact, geometric transformations of periodic layers, that are generally no longer periodic in themselves. The most suitable subtitle for the present volume would therefore have been “Periodic or Repetitive Layers”, but in the end we have decided on the shorter version.

SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.

Topics in this volume include: comparison of interferometric contouring techniques; comparison of visibility of standard scratches; and near-grazing illumination and shadowing of rough surfaces.