The main purpose of this book is to present some results in the field of generation and annealing of radiation defects in MOS structures received by the authors in their joined work during the last years. Most of the present results are a product of the collaboration between Bulgarian Academy of Sciences, Joint Institute of Nuclear Research and Russian Academy of Sciences. Metal-oxide-semiconductor (MOS) structure is (and it will be in the next several decades) the basis of electronic and microelectronic devices. Some MOS devices are faced with the necessity of working in radiation ambient and it is very important to improve their radiation hardness. On the other hand, ion implantation is a stage of some MOS devices production and along with its advantages it generates radiation defects. Radiation defects produced by ion implantation or another high energy irradiation (in particular, gamma or MeV electrons) are reviewed in the book. Special attention is paid to the characteristics of dually treated MOS structures. Investigations into effects of secondary irradiation of pre-implanted MOS structures are carried out.

Ion implantation is one of the promising areas of sciences and technologies. It has been observed as a continuously evolving technology. In this book, there is a detailed overview of the recent ion implantation research and innovation along with the existing ion implantation technological issues especially in microelectronics. The book also reviews the basic knowledge of the radiation-induced defects production during the ion implantation in case of a semiconductor structure for fabrication and development of the required perfect microelectronic devices. The improvement of the biocompatibility of biomaterials by ion implantation, which is a hot research topic, has been summarized in the book as well. Moreover, advanced materials characterization techniques are also covered in this book to evaluate the ion implantation impact on the materials.

The first comprehensive overview describing the effects of ionizing radiation on MOS devices, as well as how to design, fabricate, and test integrated circuits intended for use in a radiation environment. Also addresses process-induced radiation effects in the fabrication of high-density circuits. Reviews the history of radiation-hard technology, providing background information for those new to the field. Includes a comprehensive review of the literature and an annotated listing of research activities in radiation-hardness research.