This book provides the fundamentals and recent advances in nano and micromachining for modern manufacturing engineering. It begins by outlining nanomachining before discussing various advances in field and machining processes. The coverage concludes with an evaluation of subsurface damages in nano and micromachining and a presentation of applications in industry. As such, this book serves both as a useful classroom text for engineering and machining courses at the undergraduate and graduate level, and as a reference for academics and engineers in these areas.

This book provides the fundamentals and recent advances in nano and micromachining for modern manufacturing engineering. It begins by providing an outline of nanomachining with emphasis being given to molecular dynamics, cutting, and chip formation, before discussing various advances in field and machining processes, including advances in diamond cutting tools, conventional processes (microturning, microdrilling, micromilling, etc.), grinding and ultra-precision processes, and non-conventional machining processes (laser micromachining, EDM micromachining, etc.). The coverage concludes with an evaluation of subsurface damages in nano and micromachining and a presentation of applications in industry. As such, not only is this book useful to those studying engineering or machining at both an undergraduate and postgraduate level, but it also serves as a useful reference guide for academics and engineers involved in these areas and related industries.

This book covers the recent developments in the production of micro and nano size products, which cater to the needs of the industry. The processes to produce the miniature sized products with unique characteristics are addressed. Moreover, their application in areas such as micro-engines, micro-heat exchangers, micro-pumps, micro-channels, printing heads and medical implants are also highlighted. The book presents such microsystem-based products as important contributors to a sustainable economy. The recent research in this book focuses on the development of new micro and nano manufacturing platforms while integrating the different technologies to manufacture the micro and nano components in a high throughput and cost effective manner. The chapters contain original theoretical and applied research in the areas of micro- and nano-manufacturing that are related to process innovation, accuracy, and precision, throughput enhancement, material utilization, compact equipment development, environmental and life-cycle analysis, and predictive modeling of manufacturing processes with feature sizes less than one hundred micrometers.

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. - Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications - Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM - Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)

This, the corrected second printing of Jackson’s authoritative volume on the subject, provides a comprehensive treatment of established micro and nanofabrication techniques. It addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems. The book provides up-to-date information on a number of subjects of interest to engineers who are seeking more knowledge of how nano and micro devices are designed and fabricated. They will learn about manufacturing and fabrication techniques at the micro and nanoscales; using bulk and surface micromachining techniques, and LiGA, and deep x-ray lithography to manufacture semiconductors. Also covered are subjects including producing master molds with micromachining, the deposition of thin films, pulsed water drop machining, and nanomachining.

Micro-machining is an advanced manufacturing technique of growing importance, and adoption of micro-machining using electrochemical discharges (Micro-ECDM) has increased steadily in recent years. Among new developments is the interest of industry in Micro-ECDM. However, the potential of the technology is not being fully utilized and there is no comprehensive reference book available today covering it. Micromachining Using Electrochemical Discharge Phenomenon, Second Edition fills this gap. It is unique in its detailed coverage of all aspects of the Micro-ECDM process, as well as Spark Assisted Chemical Engraving (SACE). As such, it covers technologies such as chemical etching, micro-drilling, and other material removal mechanisms, high aspect ratio machining, design and construction of the machining apparatus, and a wide range of applications. The new edition compares Micro-ECDM and SACE with other micromachining technologies such as laser machining and traditional EDM. ECDM is used for machining of electrically non-conductive materials. Micro-ECDM/SACE is mainly applied to glass and the book focuses on glass, but the authors also present new results on other materials such as ceramics. In addition, techniques to modify material properties for the machining process are explained. The authors discuss machining strategies including the latest developments in micro-texturing of glass micro-channels and reports on developments in controlling and analysis aspects of machining. This book is a unique reference for engineers and industrial researchers involved in development, design and use of micromachining, chemical micro-drilling or chemical engraving techniques and equipment. - Only all-encompassing reference coving Micro-ECDM and SACE available on the market - Covers a wide range of applications, including applications in the MEMS industry and the Medical Devices and Medical Diagnostics industries - New edition includes expanded sections on comparing Micro-ECDM/SACE with other micromachining technologies

This volume focuses on the fundamentals and advancements in micro and nanomanufacturing technologies applied in the biomedical and biochemical domain. The contents of this volume provide comprehensive coverage of the physical principles of advanced manufacturing technologies and the know-how of their applications in the fabrication of biomedical devices and systems. The book begins by documenting the journey of miniaturization and micro-and nano-fabrication. It then delves into the fundamentals of various advanced technologies such as micro-wire moulding, 3D printing, lithography, imprinting, direct laser machining, and laser-induced plasma-assisted machining. It also covers laser-based technologies which are a promising option due to their flexibility, ease in control and application, high precision, and availability. These technologies can be employed to process several materials such as glass, polymers: polycarbonate, polydimethylsiloxane, polymethylmethacrylate, and metals such as stainless steel, which are commonly used in the fabrication of biomedical devices, such as microfluidic technology, optical and fiber-optic sensors, and electro-chemical bio-sensors. It also discusses advancements in various MEMS/NEMS based technologies and their applications in energy conversion and storage devices. The chapters are written by experts from the fields of micro- and nano-manufacturing, materials engineering, nano-biotechnology, and end-users such as clinicians, engineers, academicians of interdisciplinary background. This book will be a useful guide for academia and industry alike.

Micromanufacturing Engineering and Technology presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development), technologies, facilities, organization, competitiveness, and innovation with an analysis of future potential. The machining, forming, and joining of miniature / micro-products are all covered in depth, covering: grinding/milling, laser applications, and photo chemical etching; embossing (hot & UV), injection molding and forming (bulk, sheet, hydro, laser); mechanical assembly, laser joining, soldering, and packaging. - Presents case studies, material and design considerations, working principles, process configurations, and information on tools, equipment, parameters and control - Explains the many facets of recently emerging additive / hybrid technologies and systems, incl: photo-electric-forming, liga, surface treatment, and thin film fabrication - Outlines system engineering issues pertaining to handling, metrology, testing, integration and software - Explains widely used micro parts in bio / medical industry, information technology and automotive engineering - Covers technologies in high demand, such as: micro-mechanical-cutting, lasermachining, micro-forming, micro-EDM, micro-joining, photo-chemical-etching, photo-electro-forming, and micro-packaging

This volume presents research papers on micro and nano manufacturing and surface engineering which were presented during the 7th International and 28th All India Manufacturing Technology, Design and Research conference 2018 (AIMTDR 2018). The papers discuss the latest advances in miniature manufacturing, the machining of miniature components and features as well as improvement of surface properties. This volume will be of interest to academicians, researchers, and practicing engineers alike.

Nano and Micro Engineered Membrane Technology is about Nano and micro engineered membrane technology, an emerging new technological area in membrane technology. Potential applications cover a broad spectrum of science, such as micro and nano filtration, gas separation, optics and nanophotonics, catalysis, microbiology, controlled drug delivery, nanopatterning, micro contact printing, atomisation, cross flow emulsification, etc. A brief overview of filtration membranes and pore structures is presented in chapter 1 and in the subsequent chapter 2 an overview is presented of conventional micro perforation methods, like laser drilling, electroforming, precision etching etc. With micro engineering techniques (chapter 3), originating from the semiconductor industry, it is relatively easy to downscale and form submicron pores (down to 100 nm) using photolithographic methods, with e.g. contact masks and wafer steppers. In chapter 4 some elementary fluid mechanics related to fluid flow in conducts and single and multiple orifices is presented covering analytical methods as well as computational fluid dynamics. Much effort has been put in strength and maximum pressure load analysis (chapter 5) of perforated and unperforated membranes. New analytical expressions were obtained that were verified by a number of computer simulations and many experiments. A separate chapter (chapter 6) has been devoted to the pioneering work of manufacturing polymeric perforated membranes because of its potential future economical impact. Large scale microfiltration applications on e.g. skim milk and lager beer are presented in chapter 7, whereas in chapter 8 a micro scale Lab-on-a-Chip microfiltration/fractionation demonstrator is discussed. Nanotechnology and nano engineered membranes is the fascinating topic of chapter 9, with typical examples as nanopatterning, nanophotonics and nanomembrane technology. This book closes with novel pioneering applications on atomization (chapter 10) for deep pulmonary inhale and cross flow emulsification (chapter 11) for the manufacturing of e.g. functional foods and nano/micro emulsions. - Overview on the implementation of nano and micro engineering techniques in membrane science; which is an upcoming new cross-road technology - Demonstration of feasibility with respect to micro and nano filtration, gas separation, photonic structures, catalysis, microbiology, controlled drug delivery, nanopatterning, micro contact printing, atomisation and emulsification techniques - Informative introductions with rules of thumb for fluid flow in micro channels, pressure strength of thin supported perforated and unperforated membranes, silicon micro machining techniques, membrane filtration technology, Rayleigh breakup and cross-flow emulsification