Focusing on recent developments in engineering science, enabling hardware, advanced technologies, and software, Micromechatronics: Modeling, Analysis, and Design with MATLAB, Second Edition provides clear, comprehensive coverage of mechatronic and electromechanical systems. It applies cornerstone fundamentals to the design of electromechanical syst

After Uchino’s introduction of a new terminology, ‘Micromechatronics’ in 1979 for describing the application area of ‘piezoelectric actuators’, the rapid advances in semiconductor chip technology have led to a new terminology MEMS (micro-electro-mechanical-system) or even NEMS (nano-electro-mechanicalsystem) to describe mainly thin film sensor/actuator devices, a narrower area of micromechatronics coverage. New technologies, product developments and commercialization are providing the necessity of this major revision. In particular, the progresses in high power transducers, loss mechanisms in smart materials, energy harvesting and computer simulations are significant. New technologies, product developments and commercialization are providing the updating requirement for the book contents, in parallel to the deletion of old contents. Various educational/instructional example problems have been accumulated, which were integrated in the new edition in order to facilitate the self-learning for the students, and the quiz/problem creation for the instructors. Heavily revised topics from the previous edition include: high power transducers, loss mechanisms in smart materials, energy harvesting and computer simulations New technologies, product developments and commercialization helped shape the updated contents of this book where all chapters have been updated and revised. This textbook is intended for graduate students and industrial engineers studying or working in the fields of electronic materials, control system engineering, optical communications, precision machinery, and robotics. The text is designed primarily for a graduate course with the equivalent of thirty 75-minute lectures; however, it is also suitable for self-study by individuals wishing to extend their knowledge in the field.

This reference reveals the most significant technologies, procedures, and trends in the design and application of actuator devices for micromechatronic systems. It addresses critical design and manufacturing concepts, as well as challenges in the modeling and regulation of electromechanical losses and heat generation in actuator devices. Accompanied by a CD-ROM demonstrating examples of finite-element modeling and previously developed and commercially available actuators, Micromechatronics provides insight into the future of this evolving field, and considers recent developments in micropositioning technology and displacement transducer, motor, and ultrasonic motor applications.

The book “Case Studies in Micromechatronics – From Systems to Process” offers prominent sample applications of micromechatronic systems and the enabling fabrication technologies. The chosen examples represent five main fields of application: consumer electronics (pressure sensor), mobility and navigation (acceleration sensor), handling technology and automation (micro gripper), laboratory diagnostics (point of care system), and biomedical technology (smart skin). These five sample systems are made from different materials requiring a large variety of modern fabrication methods and design rules, which are explained in detail. As a result, an inverted introduction “from prominent applications to base technologies” is provided. Examples of applications are selected to offer a broad overview of the development environment of micromechatronic systems including established as well as cutting-edge microfabrication technologies.

Students preparing to work with mechatronics, particularly with highly precise and smart actuators, face the challenge of designing and analyzing devices without formal and practical guidance in computer techniques. Finally there is a textbook that is as practical as it is authoritative: Kenji Uchino's FEM and Micromechatronics with ATILA Software. Ideal for Today's Computer-Based Curricula Every aspect of this book reflects its focus on being easy to use, easy to teach from, and above all, easy to implement. The first half of the text outlines the theory needed to develop and design smart actuators and transducers, while the second half walks students step-by-step through the software implementation using seven extensive examples. Even the book's lay-flat binding makes it easy for students to follow the text while working simultaneously at a computer. The downloadable resources supply a free educational version of ATILA-Light. Unified Coverage for Integrated Technologies Covering the myriad challenges posed by smart transducers, the author introduces the fundamentals of piezoelectric and magnetostrictive devices, practical materials, device designs, drive and control techniques, and typical applications. Numerous problems and examples give students ample opportunity to put the concepts into practice. Outlining a complete treatment in 30 convenient 75 minute lessons, FEM and Micromechatronics with ATILA Software is a unique classroom text that students will continue to use throughout their entire careers.

Micro- and nanosystems represent an area of major scientific and technological opportunity and challenge, with actual and potential applications in almost all fields of human activity. The aim of this book is to present the central concepts of dynamic control systems (modeling, estimation, observation, identification, feedback control) and to show how they can be adapted and applied to the development of novel very small-scale systems and their associated human interfaces. The application fields presented here come from micro- and nano-robotics, biochips, near-field microscopy (AFM and STM) and nano-systems networks. Alina Voda has assembled contributions from leading experts at top research universities to produce the first overview of the major role that control systems science will play in the development of micro and nano-science and technologies.

Fusing developments in optics, electronics, and mechanics, this reference systematically explores and describes an abundance of micro-optomechatronic devices and applications. The authors outline the power and position control of a laser beam, as well as fundamental principles in optical technology. Contains examples of micro-optomechatronic

This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.