The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

This book focuses on: microsystems, including micromachines and microelectromechanical systems (MEMS), as well as micro-optical-electromechanical systems (MOEMS); and nanosystems, also referred to as nanoelectromechanical systems (NEMS) or molecular machines, including devices that incorporate nanotubes, nanocantilevers, and molecular or atomic manipulators. A wide range of physical and chemical sensor applications have been addressed with these technologies and are outlined in the book. An overall perspective on the technology required to leap from conventional micro- and nanosystems to bionanosystems, and to realize functional materials and systems for applications such as drug delivery is provided. Additional highlights include a look at the application of focused ion beam milling in characterizing MEMS devices, which is becoming a conventional tool for this purpose. The electrodeposition of structures through high aspect ratio features in thick resists is also examined. And surface and materials issues for reliability of MEMS devices are assessed and provide insight into how characterization schemes for evaluating MEMS reliability can be developed.

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

As nanotechnology has developed over the last two decades, some nanostructures, such as nanotubes, nanowires, and nanoparticles, have become very popular. However, recent research has led to the discovery of other, less-common nanoforms, which often serve as building blocks for more complex structures. In an effort to organize the field, the Handbook of Less-Common Nanostructures presents an informal classification based mainly on the less-common nanostructures. A small nanotechnological encyclopedia, this book: Describes a range of little-known nanostructures Offers a unifying vision of the synthesis of nanostructures and the generalization of rare nanoforms Includes a CD-ROM with color versions of more than 100 nanostructures Explores the fabrication of rare nanostructures, including modern physical, chemical, and biological synthesis techniques The Handbook of Less-Common Nanostructures discusses a classification system not directly related to the dimensionality and chemical composition of nanostructure-forming compounds or composite. Instead, it is based mainly on the less-common nanostructures. Possessing unusual shapes and high surface areas, these structures are potentially very useful for catalytic, medical, electronic, and many other applications.

Emphasizing their emerging capabilities, this volume provides a strong foundation for an understanding of how micro- and nanotechnologies used in biomedical research have evolved from concepts to working platforms. Volume editor Christopher Love has assembled here a highly interdisciplinary group of authors with backgrounds ranging from chemical engineering right up to materials science to reflect how the intersection of ideas from biology with engineering disciplines has spurred on innovations. In fact, a number of the basic technologies described are reaching the market to advance the discovery and development of biopharmaceuticals. The first part of the book focuses on microsystems for single-cell analysis, examining tools and techniques used to isolate cells from a range of biological samples, while the second part is dedicated to tiny technologies for modulating biological systems at the scale of individual cells, tissues or whole organisms. New tools are described which have a great potential for (pre)clinical development of interventions in a range of illnesses, such as cancer and neurological diseases. Besides describing the promising applications, the authors also highlight the ongoing challenges and opportunities in the field.

This issue of ECS Transactions covers state-of-the-art R&D results of the last 1.5 years in the field of semiconductor wafer bonding technology. Wafer Bonding Technology can be used to create novel composite materials systems and devices what would otherwise be unattainable. Wafer bonding today is rapidly expanding applications in such diverse fields as photonics, sensors, MEMS, X-ray optics, non-electronic microstructures, high performance CMOS platforms for high end servers, Si-Ge, strained SOI, Germanium-on-Insulator (GeOI), and Nanotechnologies.

Combinatorial and high-throughput experimental approaches and related informatics, modeling and data-mining methods have permitted researchers to accelerate the pace at which new, complex materials and device systems are discovered, optimized and understood. Today, the development and application of these revolutionary approaches continue to grow and diversify. This book offers an international, interdisciplinary perspective for scientists and engineers interested in combinatorial, high-throughput and advanced informatics approaches to materials research. The range of disciplines includes materials science; chemistry; physics; electrical, chemical and mechanical engineering; materials modeling; and data systems engineering. Presentations share successful studies, and illuminate current and emerging challenges in areas including: the design and fabrication of combinatorial libraries for materials and devices; high-throughput characterization methods for such systems; automation of instrumentation and data analysis; advanced modeling and data mining techniques for rapid materials design and properties prediction; and data system design and software for combinatorial workflows.

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This volume was first published in 2005.