This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.

Micro Electro Discharge Machining (EDM) is a prominent technology for the fabrication of micro components in many fields. Nowadays, it is used like a conventional machine tool due to favorable characteristics. This book provides the fundamental knowledge of the principles of the process and its variants, the different process parameters, the role of machine components and systems, the challenges, and how to eliminate processing errors. It also includes real life applications of micro EDM in different areas with the most relevant examples.

Micro Electro-fabrication outlines three major nanoscale electro-fabrication techniques, including electro-discharge machining, electrochemical machining and electrochemical deposition. Applications covered include the fabrication of nozzles for automobiles, miniature hole machining for aerospace turbine blade cooling, biomedical device fabrication, such as stents, the fabrication of microchannels for microfluidic application, the production of various MEMS devices, rapid prototyping of micro components, and nanoelectrode fabrication for scanning electron microscopy. This comprehensive book discusses the fundamental nature of the various electro-fabrication processes as well as mathematical modelling and applications. It is an important reference for materials scientists and engineers working at the nanoscale. Provides state-of-the-art research investigations on various topics of micro/nano EDM, micro LECD, micro/nano ECM and ECDM techniques Compares a variety of electro-fabrication techniques, outlining which is best in different situations Outlines a variety of modeling and optimization techniques relating to micro/nano EDM, micro LECD, micro/nano ECM and ECDM

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. - Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications - Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM - Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)

Recent advances in science and technology such as online monitoring techniques, coupling of various processing methods, surface characterization and measurement techniques have greatly promoted the development of ultraprecise machining technology. This precision now falls into the micrometer and nanometer range - hence the name micro & nanomachining technology (MNT). Machining is a complex phenomenon associated with a variety of different mechanical, physical, and chemical processes. Common principles defining control mechanisms such as O Jamie de geometry, Newton mechanics, Macroscopic Thermodynamics and Electromagnetics are not applicable to phenomena occurring at the nanometer scale whereas quantum effects, wave characteristics and the microscopic fluctuation become the dominant factors. A remarkable enhancement in computational capability through advanced computer hardware and high performance computation techniques (parallel computation) has enabled researchers to employ large scale parallel numerical simulations to investigate micro & nanomachining technologies and gain insights into related processes. Micro and Nanomachining Technology - Size, Model and Complex Mechanism introduces readers to the basics of micro & nanomachining (MNT) technology and covers some of the above techniques including molecular dynamics and finite element simulations, as well as complexity property and multiscale MNT methods. This book meets the growing need of Masters students or Ph.D. students studying nanotechnology, mechanical engineering or materials engineering, allowing them to understand the design and process issues associated with precision machine tools and the fabrication of precision components.

Micro-machining is an advanced manufacturing technique of growing importance, and adoption of micro-machining using electrochemical discharges (Micro-ECDM) has increased steadily in recent years. Among new developments is the interest of industry in Micro-ECDM. However, the potential of the technology is not being fully utilized and there is no comprehensive reference book available today covering it. Micromachining Using Electrochemical Discharge Phenomenon, Second Edition fills this gap. It is unique in its detailed coverage of all aspects of the Micro-ECDM process, as well as Spark Assisted Chemical Engraving (SACE). As such, it covers technologies such as chemical etching, micro-drilling, and other material removal mechanisms, high aspect ratio machining, design and construction of the machining apparatus, and a wide range of applications. The new edition compares Micro-ECDM and SACE with other micromachining technologies such as laser machining and traditional EDM. ECDM is used for machining of electrically non-conductive materials. Micro-ECDM/SACE is mainly applied to glass and the book focuses on glass, but the authors also present new results on other materials such as ceramics. In addition, techniques to modify material properties for the machining process are explained. The authors discuss machining strategies including the latest developments in micro-texturing of glass micro-channels and reports on developments in controlling and analysis aspects of machining. This book is a unique reference for engineers and industrial researchers involved in development, design and use of micromachining, chemical micro-drilling or chemical engraving techniques and equipment. - Only all-encompassing reference coving Micro-ECDM and SACE available on the market - Covers a wide range of applications, including applications in the MEMS industry and the Medical Devices and Medical Diagnostics industries - New edition includes expanded sections on comparing Micro-ECDM/SACE with other micromachining technologies

Addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in measuring and manipulating nano-objects. The book covers state-of-the-art MEMS and NEMS devices for DNA molecular handling and analysis, cell handling and culture on a chip, chemical lab-on-a-chip, multi-probes for vacuum tunneling microscopy and AFM, and characterization of quantum semiconductor structures. Readers will gain deep insight into such developments and students will learn about the emerging field of MEMS and nanotechnology

MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials.

Semiconductors have become tremendously important in our society. Manufacturing of electronic, optical/optoelectronic devices and micro electro mechanical systems (MEMS) from semiconductor materials has been one of the key areas that support advanced science and technology. The manufacturing of semiconductor products is a very complicated issue which involves a series of mechanical, physical, chemical and hybrid machining processes. For simplicity, we can roughly divide the manufacturing processes into two steps: the fabrication of high quality semiconductor substrates, and the generation of precise micro-nano structures on the substrates. For either step, the understanding of material removal mechanism in machining is essentially important. For this reason, the clarification of the semiconductor machining physics in the micro-nano level and the development of novel machining technologies have attracted intensive interests from industrial engineers and multidisciplinary researchers. The purpose of this book is to provide a forum for researchers and engineers to review recent achievements and new advances in the area of semiconductor machining, and to identify possible research directions in future. This book collects ten chapters devoted to some main aspects, both theoretical and experimental, of Semiconductor Machining. The first part (Chapters 1, 2 and 3) provides fundamental investigation results on ductile machining behaviors of semiconductors by using single-point diamond machining methods. The second part (Chapters 4 and 5) presents characterization results of semiconductor deformation mechanism obtained by indentation, scratching and machining tests and theoretically analysis using molecular dynamics. Part 3 (Chapters 6, 7 and 8) deals with multipoint abrasive machining processes of semiconductors including grinding, polishing and slicing. The last part (Chapters 9 and 10) is focused on the micromachining of semiconductor materials using mechanical-chemical hybrid effects and laser for micro-nano structures. These chapters cover a broad area ranging from scientific investigations at the academic level to developments and applications at the shop level. We hope this book is timely in delivering the latest achievements to the related research and development community, and also hope it can stimulate more interests in the field of semiconductor machining research. As the editors, we would like to thank all the authors for the time and effort they spent in preparing their chapters and revising their manuscripts according to the editors comments.