The object of this collection of peer-reviewed papers is to provide a forum for the discussion of new developments, recent progress and innovations in the design and implementation of MEMS, NANO and Smart Systems-on-Chip. It addresses all aspects of the design methodology of such systems, with the emphasis on current and future challenges in research and development in both academia and industry. The 983 papers are grouped into 22 chapters: Materials Behavior, Casting and Solidification, Surface, Subsurface and Interface Phenomena, Coatings and Surface Engineering, Composite Materials, Materials Forming, Machining, Nanomaterials and Nanomanufacturing, Biomedical Manufacturing, Environmentally Sustainable Manufacturing Processes and Systems, Manufacturing Process Planning and Scheduling, Meso/Micro-Manufacturing Equipment and Processes, Modeling, Analysis and Simulation of Manufacturing Processes, Computer-Aided Design, Manufacturing and Engineering, Semiconductor Materials Manufacturing, Laser-Based Manufacturing, Precision Molding Processes, Rapid Manufacturing Technologies, Nontraditional Manufacturing, Nanofabrication, Nanometrology and Applications, Metrology and Measurement, and Mechanical and Electronic Engineering Control. The huge volume of information makes this a veritable encyclopedia of the subject matter. Volume is indexed by Thomson Reuters CPCI-S (WoS).

Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.