The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Handbook of Chemicals and Gases for the Semiconductor Industry meets this need. Each of the Handbook's eight chapters is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the process, followed by tables containing physical properties, handling, safety, and other pertinent information on chemicals and gases typically used in these processes. The 270 chemical and gas entries include data on physical properties, emergency treatment procedures, waste disposal, and incompatible materials, as well as descriptions of applications, chemical mechanisms involved, and references to the literature. Appendices cross-reference entries by process, chemical name, and CAS number. The Handbook's eight chapters are: Thin Film Deposition Materials Wafer Cleaning Materials Photolithography Materials Wet and Dry Etching Materials Chemical Mechanical Planarizing Methods Carrier Gases Uncategorized Materials Semiconductor Chemicals Analysis No other single source brings together these useful and important data on chemicals and gases used in the manufacture of semiconductor devices. The Handbook of Chemicals and Gases for the Semiconductor Industry will be a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.

Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.

Interwoven within our semiconductor technology development had been the development of technologies aimed at identifying, evaluating and mitigating the environmental, health and safety (EH&S) risks and exposures associated with the manufacturing and packaging of integrated circuits. Driving and advancing these technologies have been international efforts by SEMI's Safety Division, the Semiconductor Safety Association (SSA), and the Semiconductor Industry Association (SIA). The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the primary semiconductor EH&S technologies and disciplines. To this end, the contributors have assembled a comprehensive text written by some of the leading experts in EH&S in the semiconductor industry. This text had taken three years to complete and has involved tremendous effort and commitment by the authors.They have attempted to construct a reference manual that is comprehensive in its coverage of the technical aspects of each individual subject, while at the same time addressing practical applications of each topic. The scope of this text, from its inception, was intended to address significantly more than what would typically be classified under the definition of ""safety."" However, all of the chapters have a direct application to the protection and preservation of semiconductor employees, the surrounding communities and the environment.This book is a hands-on reference to environmental, health and safety issues critical to the semiconductor industry. It was also the author's intent to produce a text that provides a practical user's guide for semiconductor environmental, health and safety practitioners as well as those individuals responsible for operation, maintenance and production in wafer fabrication facilities.

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

After 4.5 billion years of change, is the planet Earth a complex and delicate ecosystem? It is well-known that some human activities may be part of a climate-change process that affects global warming. Environmental scientists continue to make substantial progress in advancing our understanding of how such activities affect climate change. Since the year 1989, hundreds of global-warming related patents have been granted by the United States Patent and Trademark Office. This original and important book thus provides an easy-to-read summary of such patents. Within many of the summaries, there are inventor profiles and news articles that are insightful and thought-provoking. Pioneering inventors hail from many locations including Brazil, Great Britain, India, Japan, Mexico, and Taiwan. At the beginning of several chapters, contradictory opinions on climate change are provided in the form of quotes. Chapter Seven offers an example of a fascinating application that failed to gain US patent protection. In the final chapter, several significant climate-change issues that continue to be addressed are outlined.

This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.

Refineries and petrochemical engineers today are accepting more unconventional feedstocks such as heavy oil and shale, causing unique challenges on the processing side of the business. To create more reliable engineering design of process equipment for the petrochemical industry, petroleum engineers and process managers are forced to study the physical properties and compounds of these particular hydrocarbons. Instead of looking up each compound's information, The Yaws Handbook of Physical Properties for Hydrocarbons and Chemicals, Second Edition presents an easy-to-use format with rapid access to search for the particular compound and understand all the complex calculations in one tabular format. Understanding the composition of hydrocarbons is not easy to calculate quickly or accurately, but this must-have reference leads the engineer to better estimated properties and fractions from easily measured components. Expanded to cover more total compounds and relevant functions, The Yaws Handbook of Physical Properties for Hydrocarbons and Chemicals, Second Edition remains a necessary reference tool for every petrochemical and petroleum engineers' library. - Coverage added on elements for hydrocarbons and chemicals with more than 200 real-world cases included for practicality - Increased compound coverage from 41,000 to 54,000 total compounds to quickly access for everyday use - New functions added such as testing boiling point temperature and new data on density and refractory index

Corrosion can be both costly and dangerous, resulting in product contamination or loss as well as structural instability and premature failure. This handbook contains information necessary for ensuring that, regardless of the structure being built, the materials selected for construction will minimize corrosion and its consequences. Nearly t

In the field of compressed gases and related equipment, there is an expanding core of essential knowledge that people handling and using these materials should be familiar with or should know where to find when necessary. The focus of this book concerns the properties and the accepted means of trans portation, storage, and handling of compressed gases. This Handbook is simul taneously intended as an overview of the subject and a source of supplementary information. It is also intended to serve as a guide to pertinent federal regulatory requirements and published standards of the Compressed Gas Association and other standards-writing bodies. Readers are advised that the CGA technical pamphlets remain the official state ment of policy by the Association on a particular matter. Reference is made throughout this text to the numerous technical pamphlets published by the Com pressed Gas Association. Some of these publications have been incorporated by reference into federal, state, provincial, and local regulations. Since these pam phlets are reviewed on a periodic basis, wherever the text of this Handbook may be found in conflict with corresponding information in the CGA technical pam phlets, the latter shall take precedence.