Flash Lamp Annealing
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Author |
: Lars Rebohle |
Publisher |
: Springer |
Total Pages |
: 304 |
Release |
: 2019-07-27 |
ISBN-10 |
: 9783030232993 |
ISBN-13 |
: 3030232999 |
Rating |
: 4/5 (93 Downloads) |
Synopsis Flash Lamp Annealing by : Lars Rebohle
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.
Author |
: Lars Rebohle |
Publisher |
: |
Total Pages |
: 304 |
Release |
: 2019 |
ISBN-10 |
: 3030233006 |
ISBN-13 |
: 9783030233006 |
Rating |
: 4/5 (06 Downloads) |
Synopsis Flash Lamp Annealing by : Lars Rebohle
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.
Author |
: Alberto Palmero |
Publisher |
: MDPI |
Total Pages |
: 148 |
Release |
: 2020-12-10 |
ISBN-10 |
: 9783039364299 |
ISBN-13 |
: 3039364294 |
Rating |
: 4/5 (99 Downloads) |
Synopsis Advanced Strategies in Thin Film Engineering by Magnetron Sputtering by : Alberto Palmero
Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reactor, among others. At the forefront of these approaches, investigations focused on nanostructured coatings appear today as one of the priorities in many scientific and technological communities: The science behind them appears in most of the cases as a "terra incognita", fascinating both the fundamentalist, who imagines new concepts, and the experimenter, who is able to create and study new films with as of yet unprecedented performances. These scientific and technological challenges, along with the existence of numerous scientific issues that have yet to be clarified in classical magnetron sputtering depositions (e.g., process control and stability, nanostructuration mechanisms, connection between film morphology and properties or upscaling procedures from the laboratory to industrial scales) have motivated us to edit a specialized volume containing the state-of-the art that put together these innovative fundamental and applied research topics. These include, but are not limited to: • Nanostructure-related properties; • Atomistic processes during film growth; • Process control, process stability, and in situ diagnostics; • Fundamentals and applications of HiPIMS; • Thin film nanostructuration phenomena; • Tribological, anticorrosion, and mechanical properties; • Combined procedures based on the magnetron sputtering technique; • Industrial applications; • Devices.
Author |
: Carl-Mikael Zetterling |
Publisher |
: IET |
Total Pages |
: 202 |
Release |
: 2002 |
ISBN-10 |
: 0852969988 |
ISBN-13 |
: 9780852969984 |
Rating |
: 4/5 (88 Downloads) |
Synopsis Process Technology for Silicon Carbide Devices by : Carl-Mikael Zetterling
This book explains why SiC is so useful in electronics, gives clear guidance on the various processing steps (growth, doping, etching, contact formation, dielectrics etc) and describes how these are integrated in device manufacture.
Author |
: Electrochemical Society. Meeting |
Publisher |
: The Electrochemical Society |
Total Pages |
: 620 |
Release |
: 2003 |
ISBN-10 |
: 1566773768 |
ISBN-13 |
: 9781566773768 |
Rating |
: 4/5 (68 Downloads) |
Synopsis ULSI Process Integration III by : Electrochemical Society. Meeting
Author |
: B. Jayant Baliga |
Publisher |
: William Andrew |
Total Pages |
: 733 |
Release |
: 2015-03-06 |
ISBN-10 |
: 9781455731534 |
ISBN-13 |
: 1455731536 |
Rating |
: 4/5 (34 Downloads) |
Synopsis The IGBT Device by : B. Jayant Baliga
The IGBT device has proved to be a highly important Power Semiconductor, providing the basis for adjustable speed motor drives (used in air conditioning and refrigeration and railway locomotives), electronic ignition systems for gasolinepowered motor vehicles and energy-saving compact fluorescent light bulbs. Recent applications include plasma displays (flat-screen TVs) and electric power transmission systems, alternative energy systems and energy storage. This book is the first available to cover the applications of the IGBT, and provide the essential information needed by applications engineers to design new products using the device, in sectors including consumer, industrial, lighting, transportation, medical and renewable energy. The author, B. Jayant Baliga, invented the IGBT in 1980 while working for GE. His book will unlock IGBT for a new generation of engineering applications, making it essential reading for a wide audience of electrical engineers and design engineers, as well as an important publication for semiconductor specialists. - Essential design information for applications engineers utilizing IGBTs in the consumer, industrial, lighting, transportation, medical and renewable energy sectors. - Readers will learn the methodology for the design of IGBT chips including edge terminations, cell topologies, gate layouts, and integrated current sensors. - The first book to cover applications of the IGBT, a device manufactured around the world by more than a dozen companies with sales exceeding $5 Billion; written by the inventor of the device.
Author |
: Bernd Schmidt |
Publisher |
: Springer Science & Business Media |
Total Pages |
: 425 |
Release |
: 2012-12-13 |
ISBN-10 |
: 9783211993569 |
ISBN-13 |
: 3211993568 |
Rating |
: 4/5 (69 Downloads) |
Synopsis Ion Beams in Materials Processing and Analysis by : Bernd Schmidt
A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning is treated in detail. Its applications in materials research, development and analysis, developments of special techniques and interaction mechanisms of ion beams with solid state matter result in the optimization of new material properties, which are discussed thoroughly. Solid-state properties optimization for functional materials such as doped semiconductors and metal layers for nano-electronics, metal alloys, and nano-patterned surfaces is demonstrated. The ion beam is an important tool for both materials processing and analysis. Researchers engaged in solid-state physics and materials research, engineers and technologists in the field of modern functional materials will welcome this text.
Author |
: |
Publisher |
: |
Total Pages |
: 658 |
Release |
: 2005 |
ISBN-10 |
: STANFORD:36105120928333 |
ISBN-13 |
: |
Rating |
: 4/5 (33 Downloads) |
Synopsis Advanced Gate Stack, Source/drain and Channel Engineering for Si-based CMOS by :
Author |
: Hideo Hosono |
Publisher |
: John Wiley & Sons |
Total Pages |
: 644 |
Release |
: 2022-05-17 |
ISBN-10 |
: 9781119715658 |
ISBN-13 |
: 1119715652 |
Rating |
: 4/5 (58 Downloads) |
Synopsis Amorphous Oxide Semiconductors by : Hideo Hosono
AMORPHOUS OXIDE SEMICONDUCTORS A singular resource on amorphous oxide semiconductors edited by a world-recognized pioneer in the field In Amorphous Oxide Semiconductors: IGZO and Related Materials for Display and Memory, the Editors deliver a comprehensive account of the current status of—and latest developments in—transparent oxide semiconductor technology. With contributions from leading international researchers and exponents in the field, this edited volume covers physical fundamentals, thin-film transistor applications, processing, circuits and device simulation, display and memory applications, and new materials relevant to amorphous oxide semiconductors. The book makes extensive use of structural diagrams of materials, energy level and energy band diagrams, device structure illustrations, and graphs of device transfer characteristics, photographs and micrographs to help illustrate the concepts discussed within. It also includes: A thorough introduction to amorphous oxide semiconductors, including discussions of commercial demand, common challenges faced during their manufacture, and materials design Comprehensive explorations of the electronic structure of amorphous oxide semiconductors, structural randomness, doping limits, and defects Practical discussions of amorphous oxide semiconductor processing, including oxide materials and interfaces for application and solution-process metal oxide semiconductors for flexible electronics In-depth examinations of thin film transistors (TFTs), including the trade-off relationship between mobility and reliability in oxide TFTs Perfect for practicing scientists, engineers, and device technologists working with transparent semiconductor systems, Amorphous Oxide Semiconductors: IGZO and Related Materials for Display and Memory will also earn a place in the libraries of students studying oxides and other non-classical and innovative semiconductor devices. WILEY SID Series in Display Technology Series Editor: Ian Sage, Abelian Services, Malvern, UK The Society for Information Display (SID) is an international society which has the aim of encouraging the development of all aspects of the field of information display. Complementary to the aims of the society, the Wiley-SID series is intended to explain the latest developments in information display technology at a professional level. The broad scope of the series addresses all facets of information displays from technical aspects through systems and prototypes to standards and ergonomics.
Author |
: Fred Roozeboom |
Publisher |
: The Electrochemical Society |
Total Pages |
: 488 |
Release |
: 2003 |
ISBN-10 |
: 1566773962 |
ISBN-13 |
: 9781566773966 |
Rating |
: 4/5 (62 Downloads) |
Synopsis Advanced Short-time Thermal Processing for Si-based CMOS Devices by : Fred Roozeboom