The interaction of an electron beam with a solid target has been studied since the early part of the past century. Since 1960, the electron–solid interaction hasbecomethesubjectofanumberofinvestigators’workowingtoitsfun- mental role in scanning electron microscopy, in electron-probe microanalysis, in Auger electron spectroscopy, in electron-beam lithography and in radiation damage. The interaction of an electron beam with a solid target has often been investigated theoretically by using the Monte Carlo method, a nume- cal procedure involving random numbers that is able to solve mathematical problems. This method is very useful for the study of electron penetration in matter. The probabilistic laws of the interaction of an individual electron with the atoms constituting the target are well known. Consequently, it is possible to compute the macroscopic characteristics of interaction processes by simulating a large number of real trajectories, and then averaging them. The aim of this book is to study the probabilistic laws of the interaction of individual electrons with atoms (elastic and inelastic cross-sections); to - vestigate selected aspects of electron interaction with matter (backscattering coe?cients for bulk targets, absorption, backscattering and transmission for both supported and unsupported thin ?lms, implantation pro?les, seconda- electron emission, and so on); and to introduce the Monte Carlo method and its applications to compute the macroscopic characteristics of the inter- tion processes mentioned above. The book compares theory, computational simulations and experimental data in order to o?er a more global vision.

Comprehensive guide to an important materials science technique for students and researchers.

In the spring of 1963, a well-known research institute made a market survey to assess how many scanning electron microscopes might be sold in the United States. They predicted that three to five might be sold in the first year a commercial SEM was available, and that ten instruments would saturate the marketplace. In 1964, the Cambridge Instruments Stereoscan was introduced into the United States and, in the following decade, over 1200 scanning electron microscopes were sold in the U. S. alone, representing an investment conservatively estimated at $50,000- $100,000 each. Why were the market surveyers wrongil Perhaps because they asked the wrong persons, such as electron microscopists who were using the highly developed transmission electron microscopes of the day, with resolutions from 5-10 A. These scientists could see little application for a microscope that was useful for looking at surfaces with a resolution of only (then) about 200 A. Since that time, many scientists have learned to appreciate that information content in an image may be of more importance than resolution per se. The SEM, with its large depth of field and easily that often require little or no sample prepara interpreted images of samples tion for viewing, is capable of providing significant information about rough samples at magnifications ranging from 50 X to 100,000 X. This range overlaps considerably with the light microscope at the low end, and with the electron microscope at the high end.

This book presents the method of ion beam modification of solids in realization, theory and applications in a comprehensive way. It provides a review of the physical basics of ion-solid interaction and on ion-beam induced structural modifications of solids. Ion beams are widely used to modify the physical properties of materials. A complete theory of ion stopping in matter and the calculation of the energy loss due to nuclear and electronic interactions are presented including the effect of ion channeling. To explain structural modifications due to high electronic excitations, different concepts are presented with special emphasis on the thermal spike model. Furthermore, general concepts of damage evolution as a function of ion mass, ion fluence, ion flux and temperature are described in detail and their limits and applicability are discussed. The effect of nuclear and electronic energy loss on structural modifications of solids such as damage formation, phase transitions and amorphization is reviewed for insulators and semiconductors. Finally some selected applications of ion beams are given.

This new edition describes all the mechanisms of elastic and inelastic scattering of electrons with the atoms of the target as simple as possible. The use of techniques of quantum mechanics is described in detail for the investigation of interaction processes of electrons with matter. It presents the strategies of the Monte Carlo method, as well as numerous comparisons among the results of the simulations and the experimental data available in the literature. New in this edition is the description of the Mermin theory, a comparison between Mermin theory and Drude theory, a discussion about the dispersion laws, and details about the calculation of the phase shifts that are used in the relativistic partial wave expansion method. The role of secondary electrons in proton cancer therapy is discussed in the chapter devoted to applications. In this context, Monte Carlo results about the radial distribution of the energy deposited in PMMA by secondary electrons generated by energetic proton beams are presented.

Early in 1989, while most of us were gathered in the Mediterranean five-centuries-old city of Alacant, the idea of a school on stopping and particle penetration phenomena came to our minds. Later that year when discussing this plan with some of the participants in the 13th International Conference on Atomic Collisions in Solids in Aarhus, we were pleased to note that the proposal was warmly welcomed indeed by the community. An Advanced Study Institute on this or a related subject had not been organized in the last decade. Because of the progress made particularly in the interaction of high energy beams with matter, and the many applications which the general subject of the stopping of charged particles (ions and electrons) in matter enjoys, a Study Institute appeared a worthy enterprise. Even though several international conference series cover developments in these areas, they miss tutorial introductions to the field. The title chosen was Interaction of Charged Particles with Solids and Surfaces, and the objectives were stated as follows: "to cover theory and experiments, including selected applications and hot topics, of the stopping of charged particles (ions and electrons) in matter. The emphasis will be on outlining the areas where further effort is needed, and on specifying the basic needs in applications. Fundamental concepts will prevail over applications, and the character of the Institute as a school will be stressed. " The school was directed by Fernando Flores (Spain), Herbert M. Urbassek (Germany), Nestor R.

This book describes the computational methods most frequently used to deal with the interaction of charged particles, notably electrons, with condensed matter. Both elastic and inelastic scattering phenomena are discussed, and methods for calculating the relevant cross sections are explained in a rigorous but simple way. It provides readers with all the information they need in order to write their own Monte Carlo code and to simulate the transport of fast particles in condensed matter. Many numerical and experimental examples are presented throughout the book. The updated and extended fourth edition features ab initio methods for calculating dielectric function and energy loss function. Non-relativistic partial wave expansion method for calculating the differential elastic scattering cross section is also included in this new edition. It represents a very useful introduction to the relativistic partial wave expansion method, i.e., to the Mott theory, already discussed in the previous editions of this book. Further details about the effects of spin-polarization on the differential elastic scattering cross section are included in this new edition. The multiple reflection method is extended to the general case of a system composed of a set of layers of different materials and thicknesses. Analytical expressions are provided for calculating the backscattering coefficient of multilayers. New results are presented, notably about Monte Carlo simulations of reflection electron energy loss spectra and of the radial dose deposited along the track of ions impinging on materials.