Global energy demand is expected to grow 47% by 2050, with oil remaining the number one source of energy. Renewables make up 27% of the global energy mix, as predicted by the International Energy Agency (IEA). To achieve IEA’s 2050 Net Zero targets, the electricity sector needs to reduce global emissions by nearly three-quarters. Even though renewables installations are expanding quickly, there is not enough to satisfy a strong rebound in global electricity demand. This will result in a sharp rise in the use of fossil fuel electricity generation that risks pushing carbon dioxide emissions. This book presents a comprehensive overview of energy efficiency, alternative energy resources, and process optimization for future sustainability.

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.

This volume takes a much needed multiphysical approach to the numerical and experimental evaluation of the mechanical properties of MEMS and NEMS. The contributed chapters present many of the most recent developments in fields ranging from microfluids and damping to structural analysis, topology optimization and nanoscale simulations. The book responds to a growing need emerging in academia and industry to merge different areas of expertise towards a unified design and analysis of MEMS and NEMS.

This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly, advanced designs and micro/nano-fabrication methods developed in this work demonstrate valuable applications to a wide range of MEMS/NEMS devices. In particular, the HARPSS+ process platform established in this thesis features a novel slanted nano-gap transducer, which enabled the first wafer-level-packaged single-chip IMU prototype with co-fabricated high-frequency resonant triaxial gyroscopes and high-bandwidth triaxial micro-gravity accelerometers. This prototype demonstrates performance amongst the highest to date, with unmatched robustness and potential for flexible substrate integration and ultra-low-power operation. This thesis shows a path toward future low-power IMU-based applications including wearable inertial sensors, health informatics, and personal inertial navigation.

This book is a printed edition of the Special Issue "Piezoelectric MEMS" that was published in Micromachines

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

This book is a printed edition of the Special Issue "MEMS Mirrors" that was published in Micromachines

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.