Advances In Low Temperature Plasma Chemistry
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Author |
: Toshiaki Makabe |
Publisher |
: Elsevier Publishing Company |
Total Pages |
: 0 |
Release |
: 2002 |
ISBN-10 |
: 0444510958 |
ISBN-13 |
: 9780444510952 |
Rating |
: 4/5 (58 Downloads) |
Synopsis Advances in Low Temperature Rf Plasmas by : Toshiaki Makabe
Low temperature plasmas have had a very broad range of applications ever since their discovery. However, recent developments in the dextrous handling of dry etching non-equilibrium plasma have attracted a great common interest that has driving force behind the major developments in diagnostic, theoretical and numerical techniques since the 1980s. A greater fundamental understanding of the kinetics of radio-frequency (rf) plasmas and their interaction with surfaces in regard to the process of large scale integrated circuits has been achieved through the cooperation between academia and industry. At the same time, new applications have become possible, and the basic understanding of low temperature rf plasmas has diffused to other areas of plasma physics. in the special issue of Applied Surface Science, which is published in memory of the International Workshop on Basis for Low Temperature Plasma Applications at Hakone in Japan on July 24 - 25 of 2001. The basic goal in the selection of topics was to cover the range of issues that represent the building blocks of the complex, vertically integrated plasma simulation schemes including surface processes. The text also shows examples of integrated codes and how they are implemented in the development of new strategies of plasma processing. Such codes may be used both in modern experiments and in the computer aided design and control of the plasma devices of the next generation. These are based on the transport theory of electrons, ions and neutrals, as well as on numerical modellings and on the available collision and transport data describing gas and surface phases. density plasmas. All the chapters present a relatively complete review of the developments in these fields since the 1980s as well as a review of their status of development in 2002, and there is a blend of research reviews from both academia and industry.
Author |
: Paul K. Chu |
Publisher |
: CRC Press |
Total Pages |
: 497 |
Release |
: 2013-07-15 |
ISBN-10 |
: 9781466509900 |
ISBN-13 |
: 1466509902 |
Rating |
: 4/5 (00 Downloads) |
Synopsis Low Temperature Plasma Technology by : Paul K. Chu
Written by a team of pioneering scientists from around the world, Low Temperature Plasma Technology: Methods and Applications brings together recent technological advances and research in the rapidly growing field of low temperature plasmas. The book provides a comprehensive overview of related phenomena such as plasma bullets, plasma penetration into biofilms, discharge-mode transition of atmospheric pressure plasmas, and self-organization of microdischarges. It describes relevant technology and diagnostics, including nanosecond pulsed discharge, cavity ringdown spectroscopy, and laser-induced fluorescence measurement, and explores the increasing research on atmospheric pressure nonequilibrium plasma jets. The authors also discuss how low temperature plasmas are used in the synthesis of nanomaterials, environmental applications, the treatment of biomaterials, and plasma medicine. This book provides a balanced and thorough treatment of the core principles, novel technology and diagnostics, and state-of-the-art applications of low temperature plasmas. It is accessible to scientists and graduate students in low-pressure plasma physics, nanotechnology, plasma medicine, and materials science. The book is also suitable as an advanced reference for senior undergraduate students.
Author |
: Herman V. Boenig |
Publisher |
: CRC Press |
Total Pages |
: 300 |
Release |
: 1988 |
ISBN-10 |
: UCAL:B3945799 |
ISBN-13 |
: |
Rating |
: 4/5 (99 Downloads) |
Synopsis Advances in Low-Temperature Plasma Chemistry by : Herman V. Boenig
Author |
: Herman V. Boenig |
Publisher |
: |
Total Pages |
: 300 |
Release |
: 1988 |
ISBN-10 |
: UOM:39015032546759 |
ISBN-13 |
: |
Rating |
: 4/5 (59 Downloads) |
Synopsis Advances in Low-temperature Plasma Chemistry, Technology, Applications by : Herman V. Boenig
Author |
: M. Laroussi |
Publisher |
: Cambridge University Press |
Total Pages |
: 363 |
Release |
: 2012-05-24 |
ISBN-10 |
: 9781107006430 |
ISBN-13 |
: 1107006430 |
Rating |
: 4/5 (30 Downloads) |
Synopsis Plasma Medicine by : M. Laroussi
The first book dedicated exclusively to plasma medicine for graduate students and researchers in physics, engineering, biology, medicine and biochemistry.
Author |
: Shi Nguyen-Kuok |
Publisher |
: Springer |
Total Pages |
: 508 |
Release |
: 2016-11-11 |
ISBN-10 |
: 9783319437217 |
ISBN-13 |
: 3319437216 |
Rating |
: 4/5 (17 Downloads) |
Synopsis Theory of Low-Temperature Plasma Physics by : Shi Nguyen-Kuok
This book offers the reader an overview of the basic approaches to the theoretical description of low-temperature plasmas, covering numerical methods, mathematical models and modeling techniques. The main methods of calculating the cross sections of plasma particle interaction and the solution of the kinetic Boltzmann equation for determining the transport coefficients of the plasma are also presented. The results of calculations of thermodynamic properties, transport coefficients, the equilibrium particle-interaction cross sections and two-temperature plasmas are also discussed. Later chapters consider applications, and the results of simulation and calculation of plasma parameters in induction and arc plasma torches are presented. The complex physical processes in high-frequency plasmas and arc plasmas, the internal and external parameters of plasma torches, near-electrode processes, heat transfer, the flow of solid particles in plasmas and other phenomena are considered. The book is intended for professionals involved in the theoretical study of low-temperature plasmas and the design of plasma torches, and will be useful for advanced students in related areas.
Author |
: National Academies of Sciences Engineering and Medicine |
Publisher |
: |
Total Pages |
: 291 |
Release |
: 2021-02-28 |
ISBN-10 |
: 0309677602 |
ISBN-13 |
: 9780309677608 |
Rating |
: 4/5 (02 Downloads) |
Synopsis Plasma Science by : National Academies of Sciences Engineering and Medicine
Plasma Science and Engineering transforms fundamental scientific research into powerful societal applications, from materials processing and healthcare to forecasting space weather. Plasma Science: Enabling Technology, Sustainability, Security and Exploration discusses the importance of plasma research, identifies important grand challenges for the next decade, and makes recommendations on funding and workforce. This publication will help federal agencies, policymakers, and academic leadership understand the importance of plasma research and make informed decisions about plasma science funding, workforce, and research directions.
Author |
: Annemie Bogaerts |
Publisher |
: MDPI |
Total Pages |
: 248 |
Release |
: 2019-04-02 |
ISBN-10 |
: 9783038977506 |
ISBN-13 |
: 3038977500 |
Rating |
: 4/5 (06 Downloads) |
Synopsis Plasma Catalysis by : Annemie Bogaerts
Plasma catalysis is gaining increasing interest for various gas conversion applications, such as CO2 conversion into value-added chemicals and fuels, N2 fixation for the synthesis of NH3 or NOx, methane conversion into higher hydrocarbons or oxygenates. It is also widely used for air pollution control (e.g., VOC remediation). Plasma catalysis allows thermodynamically difficult reactions to proceed at ambient pressure and temperature, due to activation of the gas molecules by energetic electrons created in the plasma. However, plasma is very reactive but not selective, and thus a catalyst is needed to improve the selectivity. In spite of the growing interest in plasma catalysis, the underlying mechanisms of the (possible) synergy between plasma and catalyst are not yet fully understood. Indeed, plasma catalysis is quite complicated, as the plasma will affect the catalyst and vice versa. Moreover, due to the reactive plasma environment, the most suitable catalysts will probably be different from thermal catalysts. More research is needed to better understand the plasma–catalyst interactions, in order to further improve the applications.
Author |
: Alexander Fridman |
Publisher |
: Cambridge University Press |
Total Pages |
: |
Release |
: 2008-05-05 |
ISBN-10 |
: 9781139471732 |
ISBN-13 |
: 1139471732 |
Rating |
: 4/5 (32 Downloads) |
Synopsis Plasma Chemistry by : Alexander Fridman
Providing a fundamental introduction to all aspects of modern plasma chemistry, this book describes mechanisms and kinetics of chemical processes in plasma, plasma statistics, thermodynamics, fluid mechanics and electrodynamics, as well as all major electric discharges applied in plasma chemistry. Fridman considers most of the major applications of plasma chemistry, from electronics to thermal coatings, from treatment of polymers to fuel conversion and hydrogen production and from plasma metallurgy to plasma medicine. It is helpful to engineers, scientists and students interested in plasma physics, plasma chemistry, plasma engineering and combustion, as well as chemical physics, lasers, energy systems and environmental control. The book contains an extensive database on plasma kinetics and thermodynamics and numerical formulas for practical calculations related to specific plasma-chemical processes and applications. Problems and concept questions are provided, helpful in courses related to plasma, lasers, combustion, chemical kinetics, statistics and thermodynamics, and high-temperature and high-energy fluid mechanics.
Author |
: Vasile I. Parvulescu |
Publisher |
: John Wiley & Sons |
Total Pages |
: 423 |
Release |
: 2012-07-10 |
ISBN-10 |
: 9783527330065 |
ISBN-13 |
: 3527330062 |
Rating |
: 4/5 (65 Downloads) |
Synopsis Plasma Chemistry and Catalysis in Gases and Liquids by : Vasile I. Parvulescu
Filling the gap for a book that covers not only plasma in gases but also in liquids, this is all set to become the standard reference for this topic. It provides a broad-based overview of plasma-chemical and plasmacatalytic processes generated by electrical discharges in gases, liquids and gas/liquid environments in both fundamental and applied aspects by focusing on their environmental and green applications and also taking into account their practical and economic viability. With the topics addressed by an international group of major experts, this is a must-have for scientists, engineers, students and postdoctoral researchers specializing in this field.