A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.

A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.

Advanced Piezoelectric Materials: Science and Technology, Second Edition, provides revised, expanded, and updated content suitable for those researching piezoelectric materials or using them to develop new devices in areas such as microelectronics, optical, sound, structural, and biomedical engineering. Three new chapters cover multilayer technologies with base-metal internal electrodes, templated grain growth preparation techniques for manufacturing piezoelectric single crystals, and piezoelectric MEMS technologies. Chapters from the first edition have been revised in order to provide up-to-date, comprehensive coverage of developments in the field. Part One covers the structure and properties of a range of piezoelectric materials. Part Two details advanced manufacturing processes for particular materials and device types, including three new chapters. Finally, Part Three covers materials development for three key applications of piezoelectric materials. Dr. Kenji Uchino is a pioneer in piezoelectric actuators, Professor of Electrical Engineering at Penn State University, and Director of the International Center for Actuators and Transducers. He has authored 550 papers, 54 books and 26 patents in the ceramic actuator area. - Features an overview of manufacturing methods for a wide range of piezoelectric materials - Provides revised, expanded, and updated coverage compared to the first edition, including three new chapters - Suitable for those researching piezoelectric materials or using them to develop new devices in areas such as microelectronics, optical, sound, structural, and biomedical engineering

In Optical Nano and Micro Actuator Technology, leading engineers, material scientists, chemists, physicists, laser scientists, and manufacturing specialists offer an in-depth, wide-ranging look at the fundamental and unique characteristics of light-driven optical actuators. They discuss how light can initiate physical movement and control a variety of mechanisms that perform mechanical work at the micro- and nanoscale. The book begins with the scientific background necessary for understanding light-driven systems, discussing the nature of light and the interaction between light and NEMS/MEMS devices. It then covers innovative optical actuator technologies that have been developed for many applications. The book examines photoresponsive materials that enable the design of optically driven structures and mechanisms and describes specific light-driven technologies that permit the manipulation of micro- and nanoscale objects. It also explores applications in optofluidics, bioMEMS and biophotonics, medical device design, and micromachine control. Inspiring the next generation of scientists and engineers to advance light-driven technologies, this book gives readers a solid grounding in this emerging interdisciplinary area. It thoroughly explains the scientific language and fundamental principles, provides a holistic view of optical nano and micro actuator systems, and illustrates current and potential applications of light-driven systems.

The International Symposium for Testing and Failure Analysis (ISTFA) 2018 is co-located with the International Test Conference (ITC) 2018, October 28 to November 1, in Phoenix, Arizona, USA at the Phoenix Convention Center. The theme for the November 2018 conference is "Failures Worth Analyzing." While technology advances fast and the market demands the latest and the greatest, successful companies strive to stay competitive and remain profitable.

Microengineering and microelectromechanical systems (MEMS) are a subject of considerable current interest involving research and development throughout the world. This first volume of a series on this topic reviews and evaluates micro- and nanotechnologies applicable to U.S. Air Force and commercial space systems. It introduces the concept of application-specific integrated microinstrument (ASIM), an intelligent microinstrument.

This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.

Selected, peer reviewed papers from the 15th Annual Conference and 4th International Conference of the Chinese Society of Micro-Nano Technology (CSMNT 2013), November 3-6, 2013, Tianjin, China

The book starts with the fundamentals of triboelectric nanogenerators (TENGs), and continues through to fabrication technologies to achieve flexible and stretchable. Then self-powered flexible microsystems are introduced and application examples are presented, including TENG-based active sensors, TENG-powered actuators, artificial intelligence and integrated systems.

4th International Conference on Smart Materials, Structures and Systems Symposium E Selected, peer reviewed papers from CIMTEC 2012 - 4th International Conference on Smart Materials, Structures and Systems, June 10-14, 2012, Terme, Italy