Synthesis And Characterization Of Diamond Thin Films By Microwave Plasma Enhanced Chemical Vapor Deposition Mpecvd
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Author |
: Shih-Feng Chou |
Publisher |
: |
Total Pages |
: 174 |
Release |
: 2005 |
ISBN-10 |
: OCLC:144375842 |
ISBN-13 |
: |
Rating |
: 4/5 (42 Downloads) |
Synopsis Synthesis and Characterization of Diamond Thin Films by Microwave Plasma-enhanced Chemical Vapor Deposition (MPECVD) by : Shih-Feng Chou
Diamond thin films are deposited on silicon wafers by MPECVD process with the presence of methane, argon, and hydrogen gases. The reaction chamber is designed with an internal microwave reaction cavity and a high-pressure pocket for improving deposition conditions. Scanning electron microscopy reveals tetrahedral and cauliflower-shaped crystals for polycrystalline diamond and nanocrystalline diamond films, respectively. Spectroscopy ellipsometer studies indicate that diamond-like carbon (DLC) films are deposited with a thickness of 700 nm. Fourier transform infrared spectroscopy shows C-H stretching in the range from 2800 cm -1 to 3000 cm -1 . Nanoindentation is performed on DLC films with an average hardness of 10.98 GPa and an average elastic modulus of 90.32 GPa. The effects of chamber pressure, microwave forward power, and gas mixture on the plasma chemistry are discussed. Substrate temperature has a significant influence on film growth rate, and substrate pretreatment can enhance the quality of diamond films.
Author |
: Kevin John Grannen |
Publisher |
: |
Total Pages |
: |
Release |
: 1994 |
ISBN-10 |
: OCLC:30771685 |
ISBN-13 |
: |
Rating |
: 4/5 (85 Downloads) |
Synopsis Microwave Plasma-enhanced Chemical Vapor Deposition and Characterization of Diamond and Silicon Nitride Thin Films by : Kevin John Grannen
Author |
: Wei Zhu |
Publisher |
: |
Total Pages |
: 530 |
Release |
: 1990 |
ISBN-10 |
: OCLC:54394593 |
ISBN-13 |
: |
Rating |
: 4/5 (93 Downloads) |
Synopsis Microwave Plasma Enhanced Chemical Vapor Deposition and Structural Characterization of Diamond Films by : Wei Zhu
Author |
: Koji Kobashi |
Publisher |
: Elsevier |
Total Pages |
: 350 |
Release |
: 2010-07-07 |
ISBN-10 |
: 9780080525570 |
ISBN-13 |
: 0080525571 |
Rating |
: 4/5 (70 Downloads) |
Synopsis Diamond Films by : Koji Kobashi
- Discusses the most advanced techniques for diamond growth - Assists diamond researchers in deciding on the most suitable process conditions - Inspires readers to devise new CVD (chemical vapor deposition Ever since the early 1980s, and the discovery of the vapour growth methods of diamond film, heteroexpitaxial growth has become one of the most important and heavily discussed topics amongst the diamond research community. Kobashi has documented such discussions with a strong focus on how diamond films can be best utilised as an industrial material, working from the premise that crystal diamond films can be made by chemical vapour disposition. Kobashi provides information on the process and characterization technologies of oriented and heteroepitaxial growth of diamond films.
Author |
: Jes Asmussen |
Publisher |
: CRC Press |
Total Pages |
: 692 |
Release |
: 2002-01-23 |
ISBN-10 |
: 0203910605 |
ISBN-13 |
: 9780203910603 |
Rating |
: 4/5 (05 Downloads) |
Synopsis Diamond Films Handbook by : Jes Asmussen
The Diamond Films Handbook is an important source of information for readers involved in the new diamond film technology, emphasizing synthesis technologies and diamond film applications. Containing over 1600 references, drawings, photographs, micrographs, equations, and tables, and contributions by experts from both industry and academia, it inclu
Author |
: Dzung Tri Tran |
Publisher |
: |
Total Pages |
: 314 |
Release |
: 2005 |
ISBN-10 |
: MSU:31293027366693 |
ISBN-13 |
: |
Rating |
: 4/5 (93 Downloads) |
Synopsis Synthesis of Thin and Thick Ultra-nanocrystalline Diamond Films by Microwave Plasma CVD Systems by : Dzung Tri Tran
Author |
: A.H. Lettington |
Publisher |
: Springer Science & Business Media |
Total Pages |
: 160 |
Release |
: 2012-12-06 |
ISBN-10 |
: 9789401107259 |
ISBN-13 |
: 9401107254 |
Rating |
: 4/5 (59 Downloads) |
Synopsis Thin Film Diamond by : A.H. Lettington
This work, written by leading international authorities, deals with nucleation growth and processing, characterization and electrical, thermal, optical and mechanical properties of thin film diamond. The final chapters are devoted to the broad range of applications of this material.
Author |
: Lan Chen |
Publisher |
: |
Total Pages |
: 120 |
Release |
: 1995 |
ISBN-10 |
: OCLC:34067370 |
ISBN-13 |
: |
Rating |
: 4/5 (70 Downloads) |
Synopsis Synthesis and Characterization of Silicon Dioxide Thin Films by Plasma Enhances Chemical Vapor Deposition from Diethylsilane and Nitrous Oxide by : Lan Chen
Author |
: |
Publisher |
: |
Total Pages |
: 700 |
Release |
: 1989 |
ISBN-10 |
: PSU:000018312393 |
ISBN-13 |
: |
Rating |
: 4/5 (93 Downloads) |
Synopsis Proceedings of the ... International Symposium on Diamond and Diamond-like Films by :
Author |
: Ashok Kumar Dua |
Publisher |
: Trans Tech Publications Ltd |
Total Pages |
: 110 |
Release |
: 2004-08-08 |
ISBN-10 |
: 9783035706352 |
ISBN-13 |
: 3035706352 |
Rating |
: 4/5 (52 Downloads) |
Synopsis Diamond Thin Films - An Emerging Technology: Past, Present and Future by : Ashok Kumar Dua
Diamond, as well as being a precious gem, is a versatile material par excellence. No other material comes anywhere near to matching its properties, which are both extreme, and also expressed in rare combinations. However, natural diamonds, and those synthesised under high sandpressure temperatures, are too expensive or small for many technological applications. These limitations can be overcome by using large-area diamond coatings; chemically bonded to inexpensive non-diamond surfaces. The consequent economic advantages provide the driving force for much diamond-related research and technology.