Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.

Industry 4.1 Intelligent Manufacturing with Zero Defects Discover the future of manufacturing with this comprehensive introduction to Industry 4.0 technologies from a celebrated expert in the field Industry 4.1: Intelligent Manufacturing with Zero Defects delivers an in-depth exploration of the functions of intelligent manufacturing and its applications and implementations through the Intelligent Factory Automation (iFA) System Platform. The book’s distinguished editor offers readers a broad range of resources that educate and enlighten on topics as diverse as the Internet of Things, edge computing, cloud computing, and cyber-physical systems. You’ll learn about three different advanced prediction technologies: Automatic Virtual Metrology (AVM), Intelligent Yield Management (IYM), and Intelligent Predictive Maintenance (IPM). Different use cases in a variety of manufacturing industries are covered, including both high-tech and traditional areas. In addition to providing a broad view of intelligent manufacturing and covering fundamental technologies like sensors, communication standards, and container technologies, the book offers access to experimental data through the IEEE DataPort. Finally, it shows readers how to build an intelligent manufacturing platform called an Advanced Manufacturing Cloud of Things (AMCoT). Readers will also learn from: An introduction to the evolution of automation and development strategy of intelligent manufacturing A comprehensive discussion of foundational concepts in sensors, communication standards, and container technologies An exploration of the applications of the Internet of Things, edge computing, and cloud computing The Intelligent Factory Automation (iFA) System Platform and its applications and implementations A variety of use cases of intelligent manufacturing, from industries like flat-panel, semiconductor, solar cell, automotive, aerospace, chemical, and blow molding machine Perfect for researchers, engineers, scientists, professionals, and students who are interested in the ongoing evolution of Industry 4.0 and beyond, Industry 4.1: Intelligent Manufacturing with Zero Defects will also win a place in the library of laypersons interested in intelligent manufacturing applications and concepts. Completely unique, this book shows readers how Industry 4.0 technologies can be applied to achieve the goal of Zero Defects for all product

For courses in Semiconductor Manufacturing Technology, IC Fabrication Technology, and Devices: Conventional Flow. This up-to-date text on semiconductor manufacturing processes takes into consideration the rapid development of the industry's technology. It thoroughly describes the complicated and new IC chip fabrication processes in detail with minimum mathematics, physics, and chemistry. Advanced technologies are covered along with older ones to assist students in understanding the development processes from a historic point of view.

At the crossroads of artificial intelligence, manufacturing engineering, operational research and industrial engineering and management, multi-agent based production planning and control is an intelligent and industrially crucial technology with increasing importance. This book provides a complete overview of multi-agent based methods for today’s competitive manufacturing environment, including the Job Shop Manufacturing and Re-entrant Manufacturing processes. In addition to the basic control and scheduling systems, the author also highlights advance research in numerical optimization methods and wireless sensor networks and their impact on intelligent production planning and control system operation. Enables students, researchers and engineers to understand the fundamentals and theories of multi-agent based production planning and control Written by an author with more than 20 years’ experience in studying and formulating a complete theoretical system in production planning technologies Fully illustrated throughout, the methods for production planning, scheduling and controlling are presented using experiments, numerical simulations and theoretical analysis Comprehensive and concise, Multi-Agent Based Production Planning and Control is aimed at the practicing engineer and graduate student in industrial engineering, operational research, and mechanical engineering. It is also a handy guide for advanced students in artificial intelligence and computer engineering.

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

From Simon & Schuster, Microcosm is the provocative national bestseller by the author of Wealth and Poverty. George Gilder's Microcosm is the crystal ball of the next technological era. Leading scientists, engineers, and entrepreneurs provide vivid accounts of the latest inventions, revealing how the new international balance of power really lies in information technology.

In business today, all advantage is temporary. In order to survive-let alone thrive-companies must be able to anticipate and adapt to change, or face rapid, brutal extinction. In Clock speed, Charles Fine draws on a decades worth of research at M.I.T.s Sloan School of Management to introduce a new vocabulary for understanding the forces of competition and making strategic decisions that will determine the destiny of your company, as well as your industry. Taking inspiration from the world of biology, Fine argues that each industry has its own evolutionary life cycle (or ''clock speed''), measured by the rate at which it introduces new products, processes, and organizational structures. Just as geneticists study the fruit fly to gain insight into the evolutionary paths of all animals, managers in any industry can learn from the industrial fruit flies-such as Internet services, personal computers, and multimedia entertainment-which evolve through new generations at breakneck speed. Applying the lessons of the fruit flies to industries as diverse as bicycles, pharmaceuticals, and semiconductors, Fine illustrates how competitive advantage is lost or gained by how well a company manages dynamic web of relationships that run throughout its chain of suppliers, distributors, and alliance partners. Packed with revolutionary concepts and tools to help managers make key strategic decisions that affect current and future performance, Clock speed shows, as no other book before it, how the ultimate core competency is mastering the art of supply chain design, carefully choosing which components and capabilities to keep in-house and which to purchase from outside.

The "Students' Version is a "black and white" only version with a slightly reduced number of pages as compared to the full version of this text book. The primary purpose of our book is to provide the "fast lane" to practical quality engineering and management in the semi-conductor industries. In line with this objective, this book is meant to be more a guide to practical quality engineering and management, rather than a scientific treatise. Although it has been written for the semiconductor technology community, it goes without saying that it is useful for almost all other industrial areas, since in a way semiconductor technology (in particular micro-electronics) is a good model case how 100% stringent QM can be implemented in practice.