Micro- and nanosystems represent an area of major scientific and technological opportunity and challenge, with actual and potential applications in almost all fields of human activity. The aim of this book is to present the central concepts of dynamic control systems (modeling, estimation, observation, identification, feedback control) and to show how they can be adapted and applied to the development of novel very small-scale systems and their associated human interfaces. The application fields presented here come from micro- and nano-robotics, biochips, near-field microscopy (AFM and STM) and nano-systems networks. Alina Voda has assembled contributions from leading experts at top research universities to produce the first overview of the major role that control systems science will play in the development of micro and nano-science and technologies.

Mikro- und Nanotechnik haben Wissenschaft und Forschung revolutioniert. In Zukunft werden sie auch den Alltag verändern. Nun liegt der erste Band einer neuen Buchreihe vor: Advanced Micro and Nano Systems 1. Henry Baltes und seine Co-Autoren knüpfen mit AMN an die Sensors Update-Reihe an. Das Autorenteam wurde um weitere Experten erweitert. AMN wird zwei Mal pro Jahr mit einem neuen Band die aktuellen Entwicklungen in der Mikro- und Nano-Welt begleiten. Die Erforschung und der Einsatz von Mikro- und Nanosystemen sind eines der brandaktuellen Themen im Wissenschaftsbereich. Die Forschungsergebnisse werden mehr und mehr auch konkret umgesetzt. Damit werden Mikro- und Nanotechnologie zu Wirtschaftsfaktoren. Aktuelle Entwicklungen, neue Technologien, Nano-Bauelemente und Systeme im Mikromaßstab - Advanced Micro and Nano Systems, die neue Buchreihe, wird Spiegel der spannenden und faszinierenden Mikro- und Nano-Welt sein. Zweimal pro Jahr wird es einen neuen AMN-Band geben. Die Autoren sind ausgewiesene Spezialisten. Zu den Herausgebern zählt Henry Baltes, Professor an der ETH Zürich. Er zeichnete bereits für die Bände der Sensors Update-Reihe verantwortlich. Die Artikel ermöglichen Neueinsteigern einen ersten Zugriff auf die Materie. Fachleute erhalten einen umfassenden Überblick. Anspruch der Herausgeber ist es, nicht nur die theoretischen Grundlagen von Mikro- und Nanosystemen zu reflektieren, sondern immer auch praktische Möglichkeiten und die Grenzen der Anwendung im Blick zu haben. Die AMN-Bände sind Handbücher und Nachschlagewerke in einem. Die Reihe richtet sich an Vertreter unterschiedlicher Fachrichtungen: Biologie, Chemie, Mathematik, Sensorindustrie und Materialwissenschaften.

Micro and Nano Systems for Biophysical Studies of Cells and Small Organisms provides a comprehensive introduction to the state-of-the-art micro and nano systems that have recently been developed and applied to biophysical studies of cells and small organisms. These micro and nano systems span from microelectromechanical systems (MEMS) and microfluidic devices to robotic micro-nanomanipulation systems. These biophysical studies range from cell mechanics to the neural science of worms and Drosophila. This book will help readers understand the fundamentals surrounding the development of these tools and teach them the most recent advances in cellular and organismal biophysics enabled by these technologies. - Comprehensive coverage of micro and nano-system technology and application to biophysical studies of cells and small organisms. - Highlights the most recent advances in cellular and organismal biophysics enabled by micro and nano systems. - Insightful outlook on future directions and trends in each chapter covering a sub-area of the book topic.

Providing a detailed overview of the fundamentals and latest developments in the field of energy autonomous microsystems, this book delivers an in-depth study of the applications in the fields of health and usage monitoring in aeronautics, medical implants, and home automation, drawing out the main specifications on such systems. Introductory information on photovoltaic, thermal and mechanical energy harvesting, and conversion, is given, along with the latest results in these fields. This book also provides a state of the art of ultra-low power sensor interfaces, digital signal processing and wireless communications. In addition, energy optimizations at the sensor node and sensors network levels are discussed, thus completing this overview. This book details the challenges and latest techniques available to readers who are interested in this field. A major strength of this book is that the first three chapters are application orientated and thus, by setting the landscape, introduce the technical chapters. There is also a good balance between the technical application, covering all the system-related aspects and, within each chapter, details on the physics, materials and technologies associated with electronics. Contents Introduction. Introduction to Energy Autonomous Micro and Nano Systems and Presentation of Contributions, Marc Belleville and Cyril Condemine. 1. Sensors at the Core of Building Control, Gilles Chabanis, Laurent Chiesi, Hynek Raisigel, Isabelle Ressejac and Véronique Boutin. 2. Toward Energy Autonomous MedicalImplants, Raymond Campagnolo and Daniel Kroiss. 3. Energy Autonomous Systems in Aeronautic Applications, Thomas Becker, Jirka Klaue and Martin Kluge. 4. Energy Harvesting by Photovoltaic Effect, Emmanuelle Rouvière, Simon Perraud, Cyril Condemine and Guy Waltisperger. 5. Mechanical Energy Harvesting, Ghislain Despesse, Jean Jacques Chaillout, Sébastien Boisseau and Claire Jean-Mistral. 6. Thermal Energy Harvesting, Tristan Caroff, Emmanuelle Rouvière and Jérôme Willemin. 7. Lithium Micro-Batteries, Raphaël Salot. 8. Ultra-Low-Power Sensors, Pascal Nouet, Norbert Dumas, Laurent Latorre and Frédérick Mailly. 9. Ultra-Low-Power Signal Processing in Autonomous Systems, Christian Piguet. 10. Ultra-Low-Power Radio Frequency Communications and Protocols, Eric Mercier. 11. Energy Management in an Autonomous Microsystem, Jean-Frédéric Christmann, Edith Beigne, Cyril Condemine, Jérôme Willemin and Christian Piguet. 12. Optimizing Energy Efficiency of Sensor Networks, Olivier Sentieys and Olivier Berder.

In this book, a global team of experts from academia, research institutes and industry presents their vision on how new nano-chip architectures will enable the performance and energy efficiency needed for AI-driven advancements in autonomous mobility, healthcare, and man-machine cooperation. Recent reviews of the status quo, as presented in CHIPS 2020 (Springer), have prompted the need for an urgent reassessment of opportunities in nanoelectronic information technology. As such, this book explores the foundations of a new era in nanoelectronics that will drive progress in intelligent chip systems for energy-efficient information technology, on-chip deep learning for data analytics, and quantum computing. Given its scope, this book provides a timely compendium that hopes to inspire and shape the future of nanoelectronics in the decades to come.

The purpose of this book is to question the relationships involved in decision making and the systems designed to support it: decision support systems (DSS). The focus is on how these systems are engineered; to stop and think about the questions to be asked throughout the engineering process and, in particular, about the impact designers’ choices have on these systems. This therefore involves identifying the elements of the problem of decision support systems engineering: the main objects and dimensions to be considered and the relationships they involve, issues at the levels of the decision-maker, of the organization (and even of society), the general approach to which to subscribe and so on.

Signal Measurement and Estimation Techniques for Micro and Nanotechnology discusses micro, nano and robotic cells and gives a state-of-the-art presentation of the different techniques and solutions to measure and estimate signals at the micro and nano scale. New technologies and applications such as micromanipulation (artificial components, biological objects), micro-assembly (MEMS, MOEMS, NEMS) and material and surface force characterization are covered. The importance of sensing at the micro and nano scale is presented as a key issue in control systems, as well as for understanding the physical phenomena of these systems. The book also: Explains issues that make signal measurement and estimation techniques difficult at the micro-nano-scale and offers solutions Discusses automated micro-assembly, and control of micro-nano robotic devices Presents and links signal measurement and estimation techniques for micro-nano scale systems with microfabrication methods, sensors integration and control schemes Signal Measurement and Estimation Techniques for Micro and Nanotechnology is a must-read for researchers and engineers working in MEMS and control systems.

Nanosystems use new, nanoscopic electrical and/or mechanical devices which, as constituents of electronic and electromechanical systems, find application primarily in computing, embedded control and biomedical data acquisition. In particular, this book will deal with the characterization and patterning of these materials from an engineering perspective, with the objective of creating operational prototypes and products. The book will integrate various nano technologies on materials, devices and systems and identify key areas and results. The book will describe different design aspects for integrated systems on silicon, as well as on heterogeneous platforms including, but not limited to, electrical, optical, micromechanical and biological components in various forms and mixtures. By associating research topics from differing horizons, the book will provide a unique opportunity to bridge the gap between electronics/electrical engineering and materials science. The book will include topics at the intersection of these disciplines, and will interface with computer science, biology and medicine.

This tutorial book offers an in-depth overview of the fundamental principles of micro/nano technologies and devices related to sensing, actuation and diagnosis in fluidics and biosystems. Research in the MEMS/NEMS and lab-on-chip fields has seen rapid growth in both academic and industrial domains, as these biodevices and systems are increasingly replacing traditional large size diagnostic tools. This book is unique in describing not only the devices and technologies but also the basic principles of their operation. The comprehensive description of the fabrication, packaging and principles of micro/nano biosystems presented in this book offers guidance for researchers designing and implementing these biosystems across diverse fields including medical, pharmaceutical and biological sciences. The book provides a detailed overview of the fundamental mechanical, optical, electrical and magnetic principles involved, together with the technologies required for the design, fabrication and characterization of micro/nano fluidic systems and bio-devices. Written by a collaborative team from France and Korea, the book is suitable for academics, researchers, advanced level students and industrial manufacturers.

A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.