This handbook updates the most fast-moving research areas of porous silicon research, introduces a range of brand new topics not reviewed before and is even more inclusive of worldwide centres of expertise. Rapid advances are being made in porous silicon anodes for lithium batteries, biodegradable nanoparticles and nanoneedles for medical therapy and imaging, energetics and bio-diagnostic techniques. A number of additional characterization and processing techniques are also reviewed for the first time. Experts from 10 additional countries are involved in the 2nd edition: China, Vietnam, Singapore, Malaysia, Saudi Arabia, Turkey, Netherlands, Switzerland, Belarus, and Brazil, making more than 40 countries in total. The handbook therefore covers expertise from every continent. Another new feature is a review dedicated to industrial activity. This second edition endeavours to provide the community with a truly comprehensive database and up-to-date commentary on this versatile nanostructured material.

A detailed insight into porous silicon and its diverse novel applications.

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. - Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. - Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. - Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. - Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures

By means of electrochemical treatment, crystalline silicon can be permeated with tiny, nanostructured pores that entirely change the characteristics and properties of the material. One prominent example of this can be seen in the interaction of porous silicon with living cells, which can be totally unwilling to settle on smooth silicon surfaces but readily adhere to porous silicon, giving rise to great hopes for such future applications as programmable drug delivery or advanced, braincontrolled prosthetics. Porous silicon research is active in the fields of sensors, tissue engineering, medical therapeutics and diagnostics, photovoltaics, rechargeable batteries, energetic materials, photonics, and MEMS (Micro Electro Mechanical Systems). Written by an outstanding, well-recognized expert in the field, this book provides detailed, step-by-step instructions to prepare and characterize the major types of porous silicon. It is intended for those new to the fi eld. Sampling of topics covered: * Principles of Etching Porous Silicon * Etch Cell Construction and Considerations * Photonic Crystals, Microcavities, and Bragg Stacks Etched in Silicon * Preparation of Free-standing Films and Particles of Porous Silicon * Preparation of Photoluminescent Nanoparticles from Porous Silicon * Preparation of Silicon Nanowires by Electrochemical Etch of Silicon * Surface Modifi cation Chemistry and Biochemistry * Measurement of Optical Properties * Measurement of Pore Size, Porosity, Thickness, Surface Area The whole is backed by a generous use of color photographs to illustrate the described procedures in detail, plus a bibliography of further literature pertinent to a wide range of application fi elds. For materials scientists, chemists, physicists, optical physicists, biomaterials scientists, neurobiologists, bioengineers, and graduate students in those fields, as well as those working in the semiconductor industry.

Porous silicon is rapidly attracting increasing interest from various fields, including optoelectronics, microelectronics, photonics, medicine, sensor and energy technologies, chemistry, and biosensing. This nanostructured and biodegradable material has a range of unique properties that make it ideal for many applications. This book, the third of a

This 21st Century Nanoscience Handbook will be the most comprehensive, up-to-date large reference work for the field of nanoscience. Handbook of Nanophysics by the same editor published in the fall of 2010 and was embraced as the first comprehensive reference to consider both fundamental and applied aspects of nanophysics. This follow-up project has been conceived as a necessary expansion and full update that considers the significant advances made in the field since 2010. It goes well beyond the physics as warranted by recent developments in the field. This ninth volume in a ten-volume set covers industiral applications. Key Features: Provides the most comprehensive, up-to-date large reference work for the field. Chapters written by international experts in the field. Emphasises presentation and real results and applications. This handbook distinguishes itself from other works by its breadth of coverage, readability and timely topics. The intended readership is very broad, from students and instructors to engineers, physicists, chemists, biologists, biomedical researchers, industry professionals, governmental scientists, and others whose work is impacted by nanotechnology. It will be an indispensable resource in academic, government, and industry libraries worldwide. The fields impacted by nanophysics extend from materials science and engineering to biotechnology, biomedical engineering, medicine, electrical engineering, pharmaceutical science, computer technology, aerospace engineering, mechanical engineering, food science, and beyond.

This book discusses multiways in the porous materials. It involves materials with a large number of holes, and it highlights the synthesis, structure, and surface properties of porous materials closely related to more applications, such as support, catalyst, energy storage, chemical reactions, and optical applications. It studies the effect of the filling materials, the thermal treatments, and the porous density in the improvement of physical properties, electrical and energy efficiency, and the generation of new materials. Some synthetic process will be discussed with the effect of some parameters on the final characteristics of the prepared porous structures.

Porous silicon is rapidly attracting increasing interest in various fields, including optoelectronics, microelectronics, photonics, medicine, chemistry, biosensing, and energy. Porous Silicon: Formation and Properties fills a gap in the literature of the field today, providing a thorough introduction to current knowledge of the formation, processin

Because of unique water properties, humidity affects materials and many living organisms, including humans. Humidity control is important in various fields, from production management to creating a comfortable living environment. The range of materials that can be used in the development of humidity sensors is very broad, and the third volume of the Handbook of Humidity Measurement offers an analysis on various humidity-sensitive materials and sensor technologies used in the fabrication of humidity sensors and methods acceptable for their testing. Additional features include: numerous strategies for the fabrication and characterization of humidity-sensitive materials and sensing structures used in sensor applications, methods and properties to develop smaller, cheaper, more robust, and accurate devices with better sensitivity and stability, a guide to sensor selection and an overview of the humidity sensor market, and new technology solutions for integration, miniaturization, and specificity of the humidity sensor calibration. Handbook of Humidity Measurement, Volume 3: Sensing Materials and Technologies provides valuable information for practicing engineers, measurement experts, laboratory technicians, project managers in industries and national laboratories, and university students and professors interested in solutions to humidity measurement tasks. Despite the fact that this book is devoted to the humidity sensors, it can be used as a basis for understanding fundamentals of any gas sensor operation and development.