Gimballed Electrostatic Microactuators With Embedded Interconnects
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Author |
: Bharat Bhushan |
Publisher |
: Springer Science & Business Media |
Total Pages |
: 1232 |
Release |
: 2004-01-19 |
ISBN-10 |
: 9783540012184 |
ISBN-13 |
: 3540012184 |
Rating |
: 4/5 (84 Downloads) |
Synopsis Springer Handbook of Nanotechnology by : Bharat Bhushan
This major work has established itself as the definitive reference in the nanoscience and nanotechnology area in one volume. In presents nanostructures, micro/nanofabrication, and micro/nanodevices. Special emphasis is on scanning probe microscopy, nanotribology and nanomechanics, molecularly thick films, industrial applications and microdevice reliability, and on social aspects. Reflecting further developments, the new edition has grown from six to eight parts. The latest information is added to fields such as bionanotechnology, nanorobotics, and NEMS/MEMS reliability. This classic reference book is orchestrated by a highly experienced editor and written by a team of distinguished experts for those learning about the field of nanotechnology.
Author |
: |
Publisher |
: |
Total Pages |
: 832 |
Release |
: 2001 |
ISBN-10 |
: STANFORD:36105110578734 |
ISBN-13 |
: |
Rating |
: 4/5 (34 Downloads) |
Synopsis Dissertation Abstracts International by :
Author |
: Alexandros Prodromos Papavasiliou |
Publisher |
: |
Total Pages |
: 274 |
Release |
: 2001 |
ISBN-10 |
: UCAL:C3448467 |
ISBN-13 |
: |
Rating |
: 4/5 (67 Downloads) |
Synopsis Bubble-actuated Planar Microvalves by : Alexandros Prodromos Papavasiliou
Author |
: Lilac Muller |
Publisher |
: |
Total Pages |
: 288 |
Release |
: 2000 |
ISBN-10 |
: UCAL:C3445944 |
ISBN-13 |
: |
Rating |
: 4/5 (44 Downloads) |
Synopsis Gimballed Electrostatic Microactuators with Embedded Interconnects by : Lilac Muller
Author |
: John McCaslin Heck |
Publisher |
: |
Total Pages |
: 272 |
Release |
: 2001 |
ISBN-10 |
: UCAL:C3448253 |
ISBN-13 |
: |
Rating |
: 4/5 (53 Downloads) |
Synopsis Polycrystalline Silicon Germanium for Fabrication, Release, and Packaging of Microelectromechanical Systems by : John McCaslin Heck
Author |
: Andrew Carl Miner |
Publisher |
: |
Total Pages |
: 284 |
Release |
: 2002 |
ISBN-10 |
: UCAL:C3483572 |
ISBN-13 |
: |
Rating |
: 4/5 (72 Downloads) |
Synopsis Scanning Probe Microscopy for the Study of Thermal, Electrical, and Thermoelectric Properties by : Andrew Carl Miner
Author |
: Philip Anthony Stupar |
Publisher |
: |
Total Pages |
: 304 |
Release |
: 2001 |
ISBN-10 |
: UCAL:C3448213 |
ISBN-13 |
: |
Rating |
: 4/5 (13 Downloads) |
Synopsis Micro-fabricated Shells for Mechanical and Fluidic Interconnects by : Philip Anthony Stupar
Author |
: |
Publisher |
: |
Total Pages |
: 1072 |
Release |
: 2003 |
ISBN-10 |
: UOM:39015047932812 |
ISBN-13 |
: |
Rating |
: 4/5 (12 Downloads) |
Synopsis Digest of Technical Papers by :
Author |
: Stephanus Büttgenbach |
Publisher |
: Springer Science & Business Media |
Total Pages |
: 447 |
Release |
: 2011-03-04 |
ISBN-10 |
: 9783642129032 |
ISBN-13 |
: 364212903X |
Rating |
: 4/5 (32 Downloads) |
Synopsis Design and Manufacturing of Active Microsystems by : Stephanus Büttgenbach
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.
Author |
: Reza Ghodssi |
Publisher |
: Springer Science & Business Media |
Total Pages |
: 1211 |
Release |
: 2011-03-18 |
ISBN-10 |
: 9780387473185 |
ISBN-13 |
: 0387473181 |
Rating |
: 4/5 (85 Downloads) |
Synopsis MEMS Materials and Processes Handbook by : Reza Ghodssi
MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.