Gate Dielectrics and MOS ULSIs

Gate Dielectrics and MOS ULSIs
Author :
Publisher : Springer Science & Business Media
Total Pages : 362
Release :
ISBN-10 : 9783642608568
ISBN-13 : 3642608566
Rating : 4/5 (68 Downloads)

Synopsis Gate Dielectrics and MOS ULSIs by : Takashi Hori

Gate Dielectrics and MOS ULSIs provides necessary and sufficient information for those who wish to know well and go beyond the conventional SiO2 gate dielectric. The topics particularly focus on dielectric films satisfying the superior quality needed for gate dielectrics even in large-scale integration. And since the quality requirements are rather different between device applications, they are selected in an applicatipn-oriented manner, e.g., conventional SiO2 used in CMOS logic circuits, nitrided oxides, which recently became indispensable for flash memories, and composite ONO and ferroelectric films for passive capacitors used in DRAM applications. The book also covers issues common to all gate dielectrics, such as MOSFET physics, evaluation, scaling, and device application/integration for successful development. The information is as up to date as possible, especially for nanometer-range ultrathin gate-dielectric films indispensible in submicrometer ULSIs. The text together with abundant illustrations will take even the inexperienced reader up to the present high state of the art. It is the first book presenting nitrided gate oxides in detail.

Introduction to Microfabrication

Introduction to Microfabrication
Author :
Publisher : John Wiley & Sons
Total Pages : 428
Release :
ISBN-10 : 0470851066
ISBN-13 : 9780470851067
Rating : 4/5 (66 Downloads)

Synopsis Introduction to Microfabrication by : Sami Franssila

Nanotechnology and microengineering are among the top priority research areas for the US and Europe. This text provides coverage of all aspects of the attempt to build functional devices at a molecular size.

Nano-CMOS Circuit and Physical Design

Nano-CMOS Circuit and Physical Design
Author :
Publisher : John Wiley & Sons
Total Pages : 413
Release :
ISBN-10 : 9780471678861
ISBN-13 : 0471678864
Rating : 4/5 (61 Downloads)

Synopsis Nano-CMOS Circuit and Physical Design by : Ban Wong

Based on the authors' expansive collection of notes taken over the years, Nano-CMOS Circuit and Physical Design bridges the gap between physical and circuit design and fabrication processing, manufacturability, and yield. This innovative book covers: process technology, including sub-wavelength optical lithography; impact of process scaling on circuit and physical implementation and low power with leaky transistors; and DFM, yield, and the impact of physical implementation.

High-k Gate Dielectric Materials

High-k Gate Dielectric Materials
Author :
Publisher : CRC Press
Total Pages : 248
Release :
ISBN-10 : 9781000527445
ISBN-13 : 1000527441
Rating : 4/5 (45 Downloads)

Synopsis High-k Gate Dielectric Materials by : Niladri Pratap Maity

This volume explores and addresses the challenges of high-k gate dielectric materials, one of the major concerns in the evolving semiconductor industry and the International Technology Roadmap for Semiconductors (ITRS). The application of high-k gate dielectric materials is a promising strategy that allows further miniaturization of microelectronic components. This book presents a broad review of SiO2 materials, including a brief historical note of Moore’s law, followed by reliability issues of the SiO2 based MOS transistor. It goes on to discuss the transition of gate dielectrics with an EOT ~ 1 nm and a selection of high-k materials. A review of the various deposition techniques of different high-k films is also discussed. High-k dielectrics theories (quantum tunneling effects and interface engineering theory) and applications of different novel MOSFET structures, like tunneling FET, are also covered in this book. The volume also looks at the important issues in the future of CMOS technology and presents an analysis of interface charge densities with the high-k material tantalum pentoxide. The issue of CMOS VLSI technology with the high-k gate dielectric materials is covered as is the advanced MOSFET structure, with its working structure and modeling. This timely volume will prove to be a valuable resource on both the fundamentals and the successful integration of high-k dielectric materials in future IC technology.

High-k Gate Dielectrics for CMOS Technology

High-k Gate Dielectrics for CMOS Technology
Author :
Publisher : John Wiley & Sons
Total Pages : 560
Release :
ISBN-10 : 9783527646364
ISBN-13 : 3527646361
Rating : 4/5 (64 Downloads)

Synopsis High-k Gate Dielectrics for CMOS Technology by : Gang He

A state-of-the-art overview of high-k dielectric materials for advanced field-effect transistors, from both a fundamental and a technological viewpoint, summarizing the latest research results and development solutions. As such, the book clearly discusses the advantages of these materials over conventional materials and also addresses the issues that accompany their integration into existing production technologies. Aimed at academia and industry alike, this monograph combines introductory parts for newcomers to the field as well as advanced sections with directly applicable solutions for experienced researchers and developers in materials science, physics and electrical engineering.

Physics and Technology of High-k Gate Dielectrics 6

Physics and Technology of High-k Gate Dielectrics 6
Author :
Publisher : The Electrochemical Society
Total Pages : 550
Release :
ISBN-10 : 9781566776516
ISBN-13 : 1566776511
Rating : 4/5 (16 Downloads)

Synopsis Physics and Technology of High-k Gate Dielectrics 6 by : S. Kar

The issue covers in detail all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, novel and still higher permittivity dielectric materials, CMOS processing with high-K layers, metals for gate electrodes, interface issues, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.

High Dielectric Constant Materials

High Dielectric Constant Materials
Author :
Publisher : Springer Science & Business Media
Total Pages : 740
Release :
ISBN-10 : 3540210814
ISBN-13 : 9783540210818
Rating : 4/5 (14 Downloads)

Synopsis High Dielectric Constant Materials by : Howard Huff

Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their impact, along with the creative directions and forthcoming challenges that will define the future of gate dielectric scaling technology. Topics include: an extensive review of Moore's Law, the classical regime for SiO2 gate dielectrics; the transition to silicon oxynitride gate dielectrics; the transition to high-K gate dielectrics (including the drive towards equivalent oxide thickness in the single-digit nanometer regime); and future directions and issues for ultimate technology generation scaling. The vision, wisdom, and experience of the team of authors will make this book a timely, relevant, and interesting, resource focusing on fundamentals of the 45 nm Technology Generation and beyond.

High Permittivity Gate Dielectric Materials

High Permittivity Gate Dielectric Materials
Author :
Publisher : Springer Science & Business Media
Total Pages : 515
Release :
ISBN-10 : 9783642365355
ISBN-13 : 3642365353
Rating : 4/5 (55 Downloads)

Synopsis High Permittivity Gate Dielectric Materials by : Samares Kar

"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, metal gate electrodes, flat-band and threshold voltage tuning, channel mobility, high-k gate stack degradation and reliability, lanthanide-based high-k gate stack materials, ternary hafnia and lanthania based high-k gate stack films, crystalline high-k oxides, high mobility substrates, and parameter extraction. Each chapter begins with the basics necessary for understanding the topic, followed by a comprehensive review of the literature, and ultimately graduating to the current status of the technology and our scientific understanding and the future prospects." .

High k Gate Dielectrics

High k Gate Dielectrics
Author :
Publisher : CRC Press
Total Pages : 500
Release :
ISBN-10 : 9781000687248
ISBN-13 : 1000687244
Rating : 4/5 (48 Downloads)

Synopsis High k Gate Dielectrics by : Michel Houssa

The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be requ

Materials Fundamentals of Gate Dielectrics

Materials Fundamentals of Gate Dielectrics
Author :
Publisher : Springer Science & Business Media
Total Pages : 477
Release :
ISBN-10 : 9781402030789
ISBN-13 : 1402030789
Rating : 4/5 (89 Downloads)

Synopsis Materials Fundamentals of Gate Dielectrics by : Alexander A. Demkov

This book presents materials fundamentals of novel gate dielectrics that are being introduced into semiconductor manufacturing to ensure the continuous scalling of the CMOS devices. This is a very fast evolving field of research so we choose to focus on the basic understanding of the structure, thermodunamics, and electronic properties of these materials that determine their performance in device applications. Most of these materials are transition metal oxides. Ironically, the d-orbitals responsible for the high dielectric constant cause sever integration difficulties thus intrinsically limiting high-k dielectrics. Though new in the electronics industry many of these materials are wel known in the field of ceramics, and we describe this unique connection. The complexity of the structure-property relations in TM oxides makes the use of the state of the art first-principles calculations necessary. Several chapters give a detailed description of the modern theory of polarization, and heterojunction band discontinuity within the framework of the density functional theory. Experimental methods include oxide melt solution calorimetry and differential scanning calorimetry, Raman scattering and other optical characterization techniques, transmission electron microscopy, and x-ray photoelectron spectroscopy. Many of the problems encounterd in the world of CMOS are also relvant for other semiconductors such as GaAs. A comprehensive review of recent developments in this field is thus also given. The book should be of interest to those actively engaged in the gate dielectric research, and to graduate students in Materials Science, Materials Physics, Materials Chemistry, and Electrical Engineering.