Epitaxial Ni-Mn-Ga thin films have attracted considerable attention, since they are promising candidates for magnetic sensors and actuators in micro-electro-mechanical systems. Comprehensive information on the microstructural and crystallographic features of the NiMnGa films and their relationship with the constraints of the substrate is essential for further property optimization. In the present work, epitaxial Ni-Mn-Ga thin films were produced by DC magnetron sputtering and then characterized by x-ray diffraction technique (XRD) and backscatter electron diffraction equipped in scanning electron microscope (SEM-EBSD). Epitaxial NiMnGa thin films with nominal composition of Ni50Mn30Ga20 and thickness of 1.5 μm were successfully fabricated on MgO monocrystalline substrate by DC magnetron sputtering, after the optimization of sputtering parameters such as sputtering power, substrate temperature and seed layer by the present work. XRD diffraction measurements demonstrate that the epitaxial NiMnGa thin films are composed of three phases: austenite, NM martensite and 7M martensite. With the optimized measurement geometries, maximum number of diffraction peaks of the concerning phases, especially of the low symmetrical 7M martensite, are acquired and analyzed. The lattice constants of all the three phases under the constraints of the substrate in the films are fully determined. These serve as prerequisites for the subsequent EBSD crystallographic orientation characterizations. SEM-EBSD in film depth analyses further verified the co-existence situation of the three constituent phases: austenite, 7M martensite and NM martensite. NM martensite is located near the free surface of the film, austenite above the substrate surface, and 7M martensite in the intermediate layers between austenite and NM martensite. Microstructure characterization shows that both the 7M martensite and NM martensite are of plate morphology and organized into two characteristic zones featured with low and high relative second electron image contrast. Local martensite plates with similar plate morphology orientation are organized into plate groups or groups or variant colonies. Further EBSD characterization indicates that there are four distinct martensite plates in each variant groups for both NM and 7M martensite. Each NM martensite plate is composed of paired major and minor lamellar variants in terms of their thicknesses having a coherent interlamellar interface, whereas, each 7M martensite plate contains one orientation variant. Thus, there are four orientation 7M martensite variants and eight orientation NM martensite variants in one variant group. According to the crystallographic orientation of martensites and the crystallographic calculation, for NM martensite, the inter-plate interfaces are composed of compound twins in adjacent NM plates. The symmetrically distribution of compound twins results in the long and straight plate interfaces in the low relative contrast zone. The asymmetrically distribution leads to the change of inter-plate interface orientation in the high relative contrast zone. For 7M martensite, both Type-I and Type-II twin interfaces are nearly perpendicular to the substrate surface in the low relative contrast zones. The Type-I twin pairs appear with much higher frequency, as compared with that of the Type-II twin pairs. However, there are two Type-II twin interface trace orientations and one Type-I twin interface trace orientation in the high relative contrast zones. The Type-II twin pairs are more frequent than the Type-I twin pairs. The inconsistent occurrences of the different types of twins in different zones are originated from the substrate constrain. The crystallographic calculation also indicates that the martensitic transformation sequence is from Austenite to 7M martensite and then transform into NM martensite (A→7M→NM). [...].

Ni-Mn-Ga is a ferromagnetic shape memory alloy that can be used for future sensors and actuators. It has been shown that magnetic field can induce phase transformation and consequently large strain in stoichiometric Ni2MnGa. Since then considerable progress has been made in understanding the underlying science of shape memory and ferromagnetic shape memory in bulk materials. Ni-Mn-Ga thin films, however is a relatively under explored area. Ferromagnetic shape memory alloy thin films are conceived as the future MEMS sensor and actuator materials. With a 9.5 percent strain rate reported from magnetic reorientation, Ni-Mn-Ga thin films hold great promise as actuator materials. Thin films come with a number of advantages and challenges as compared to their bulk counterparts. While properties like mechanical strength, uniformity are much better in thin film form, high stress and constraint from the substrate pose a significant challenge for reorientation and shape memory behavior. In either case, it is very important to understand their behavior and examine their properties. This thesis is an effort to contribute to the literature of Ni-Mn-Ga thin films as ferromagnetic shape memory alloys. The focus of this project is to develop a recipe for fabricating NiMnGa thin films with desired composition and microstructure and hence unique properties for future MEMS actuator materials and characterize their properties to aid better understanding of their behavior. In this project NiMnGa thin films have been fabricated using magnetron sputtering on a variety of substrates. Magnetron sputtering technique allows us to tailor the composition of films which is crucial for controlling the phase transformation properties of NiMnGa films. The composition is tailored by varying several deposition parameters. Microstructure of the films has been investigated by X-ray diffraction (XRD) and transmission electron microscopy (TEM) techniques. Mechanical properties of as-deposited films have been probed using nano-indentation technique. The chemistry of sputtered films is determined quantitatively by wavelength dispersive X-ray spectroscopy (WDS). Phase transformation is studied by using a combination of differential scanning calorimetry (DSC), in-situ heating in TEM and in-situ XRD instruments. Magnetic properties of films are examined using superconducting quantum interface device (SQUID).

This book, the first dedicated to this exciting and rapidly growing field, enables readers to understand and prepare high-quality, high-performance TiNi shape memory alloys (SMAs). It covers the properties, preparation and characterization of TiNi SMAs, with particular focus on the latest technologies and applications in MEMS and biological devices. Basic techniques and theory are covered to introduce new-comers to the subject, whilst various sub-topics, such as film deposition, characterization, post treatment, and applying thin films to practical situations, appeal to more informed readers. Each chapter is written by expert authors, providing an overview of each topic and summarizing all the latest developments, making this an ideal reference for practitioners and researchers alike.

Our understanding and control of epitaxial oxide heterostructures has progressed along multiple frontiers including magnetic, dielectric, ferroelectric, and superconducting oxide materials. This has resulted in both independent rediscovery and the successful borrowing of ideas from ceramic science, solid-state physics, and semiconductor epitaxy. A new field of materials science has emerged which aims at the use of the intrinsic properties of various oxide materials in single-crystal thin-film form. Exploiting the potential of these materials, however, will only be possible if many fundamental and engineering questions can be answered. This book represents continued progress toward fulfilling that promise. Technical information on epitaxial oxide thin films from industry, academia and government laboratories is presented. Topics include: dielectrics; ferroelectrics; optics; superconductors; magnetics; magnetoresistance.

This book gives an overview of the physics of Heusler compounds ranging from fundamental properties of these alloys to their applications. Especially Heusler compounds as half-metallic ferromagnetic and topological insulators are important in condensed matter science due to their potential in magnetism and as materials for energy conversion. The book is written by world-leaders in this field. It offers an ideal reference to researchers at any level.

Nanoscale Magnetic Materials and Applications covers exciting new developments in the field of advanced magnetic materials. Readers will find valuable reviews of the current experimental and theoretical work on novel magnetic structures, nanocomposite magnets, spintronic materials, domain structure and domain-wall motion, in addition to nanoparticles and patterned magnetic recording media. Cutting-edge applications in the field are described by leading experts from academic and industrial communities. These include new devices based on domain wall motion, magnetic sensors derived from both giant and tunneling magnetoresistance, thin film devices in micro-electromechanical systems, and nanoparticle applications in biomedicine. In addition to providing an introduction to the advances in magnetic materials and applications at the nanoscale, this volume also presents emerging materials and phenomena, such as magnetocaloric and ferromagnetic shape memory materials, which motivate future development in this exciting field. Nanoscale Magnetic Materials and Applications also features a foreword written by Peter Grünberg, recipient of the 2007 Nobel Prize in Physics.