La microélectronique est un monde complexe dans lequel plusieurs sciences comme la physique, l’électronique, l’optique ou la mécanique, contribuent à créer des nano-objets fonctionnels. La chimie est particulièrement impliquée dans de nombreux domaines tels que la synthèse des matériaux, la pureté des fluides, des gaz, des sels, le suivi des réactions chimiques et de leurs équilibres ainsi que la préparation de surfaces optimisées et la gravure sélective de couches spécifiques. Au cours des dernières décennies, la taille des transistors s’est considérablement réduite et la fonctionnalité des circuits électroniques s’est accrue. Cette évolution a conduit à une interpénétration de la chimie et de la microélectronique exposée dans cet ouvrage. Chimie en microélectronique présente les chimies et les séquences utilisées lors des procédés de production de la microélectronique, des nettoyages jusqu’aux gravures des plaquettes de silicium, du rôle et de l’impact de leur niveau de pureté jusqu’aux procédés d’interconnexion des millions de transistors composant un circuit électronique. Afin d’illustrer la convergence avec le domaine de la santé, l’ouvrage expose les nouvelles fonctionnalisations spécifiques, tels que les capteurs biologiques ou les capteurs sur la personne.

The French-English volume of this highly acclaimed set consists of some 100,000 keywords in both French and English, drawn from the whole range of modern applied science and technical terminology. Covers over 70 subject areas, from engineering and chemistry to packaging, transportation, data processing and much more.

The French-English volume of this highly acclaimed set consists of some 100,000 keywords in both French and English, drawn from the whole range of modern applied science and technical terminology. Covers over 70 subject areas, from engineering and chemistry to packaging, transportation, data processing and much more.

This is the third edition of the European Workshop on Microelectronics Education (EWME). A steady-state regime has now been reached. An international community of university teachers is constituted; they exchange their experience and their pedagogical tools. They discuss the best ways to transfer the rapidly changing techniques to their students, and to introduce them to the new physical and mathematical concepts and models for the innovative techniques, devices, circuits and design methods. The number of abstracts submitted to EWME 2000 (about one hundred) enabled the scientific committee to proceed to a clear selection. EWME is a European meeting. Indeed, authors from 20 different European countries contribute to this volume. Nevertheless, the participation of authors from Brazil, Canada, China, New Zealand, and USA, shows that the workshop gradually attains an international dimension. th The 20 century can be characterized as the "century of electron". The electron, as an elementary particle, was discovered by J.J. Thomson in 1897, and was rapidly used to transfer energy and information. Thanks to electron, universe and micro-cosmos could be explored. Electron became the omnipotent and omnipresent, almost immaterial, angel of our W orId. This was made possible thanks to electronics and, for the last 30 years, to microelectronics. Microelectronics not only modified and even radically transformed the industrial and the every-day landscapes, but it also led to the so-called "information revolution" with which begins the 21 st century.

Cet ouvrage propose un panorama détaillé des micro et nanosystèmes autonomes en énergie, couvrant à la fois les principes mis en oeuvre et les derniers développements. Une étude approfondie d'applications dans les domaines aéronautiques, médicaux et du contrôle des bâtiments permet de dresser les grandes spécifications de tels systèmes et de leurs sous-composants. Les techniques les plus récentes de récupération et conversion d'énergie d'origine photovoltaïque, thermique et mécanique sont présentées. Un état de l'art sur les interfaces capteurs, le traitement du signal numérique et les liaisons radiofréquence, ultra-basse consommation, complète ce panorama. Enfin, des techniques d'optimisation de l'énergie au niveau du microsystème/noeud de capteur et d'un réseau de capteurs sont introduites et discutées.

Techniques such as surface patterning have facilitated the emergence of advanced polymers with applications in areas such as microelectronics. Surface patterning of polymers has conventionally been undertaken by optical lithography. However, a new generation of nanolithographic and patterning techniques has made it possible to develop complex patterns at the nanoscale. Non-conventional lithography and patterning summarises this new range of techniques and their industrial applications.A number of chapters look at ways of forming and modifying surfaces for patterning. These are complemented by chapters on particular patterning techniques such as soft lithography, ion beam patterning, the use of nanostencils, photolithography and inkjet printing. The book also discusses prototyping and the manufacture of particular devices.With its distinguished international team of contributors, Non-conventional lithography and patterning is a standard reference for both those researching and using advanced polymers in such areas as microelectronics and biomedical devices. - Looks at alternative approaches used to develop complex patterns at the nanoscale - Concentrates on state of the art nanolithographic methods - Written by a distinguished international team of contributors

This volume contains papers on the following: CMOS devices and devices based on compound semiconductors; processing; silicon integrated technology and integrated circuit design; quantum physics; nanotechnology; nanodevices, sensors and microsystems. The latest news and future challenges in these fields are presented in invited papers.

Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing into chemistry, electrochemistry, as well as biology, biochemistry and medicine. Chemistry is involved in many fields from materials, chemicals, gases, liquids or salts, the basics of reactions and equilibrium, to the optimized cleaning of surfaces and selective etching of specific layers. In addition, over recent decades, the size of the transistors has been drastically reduced while the functionality of circuits has increased. This book consists of five chapters covering the chemicals and sequences used in processing, from cleaning to etching, the role and impact of their purity, along with the materials used in “Front End Of the Line” which corresponds to the heart and performance of individual transistors, then moving on to the “Back End Of the Line” which is related to the interconnection of all the transistors. Finally, the need for specific functionalization also requires key knowledge on surface treatments and chemical management to allow new applications. Contents 1. Chemistry in the “Front End of the Line” (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, François Martin, Jean-Michel Hartmann, Véronique Carron and Yannick Le Tiec. 2. Chemistry in Interconnects, Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean and Didier Louis. 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying, Yannick Le Tiec and Martin Knotter. 4. The Use and Management of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, Catherine Peyne and Patrick Valenti. 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet. About the Authors Yannick Le Tiec is a technical expert at CEA-Leti, Minatec since 2002. He is a CEA-Leti assignee at IBM, Albany (NY) to develop the advanced 14 nm CMOS node and the FDSOI technology. He held different technical positions from the advanced 300 mm SOI CMOS pilot line to different assignments within SOITEC for advanced wafer development and later within INES to optimize solar cell ramp-up and yield. He has been part of the ITRS Front End technical working group at ITRS since 2008.

This book examines the current state of the art, new challenges, opportunities, and applications of IPNs. With contributions from experts across the globe, this survey is an outstanding resource reference for anyone involved in the field of polymer materials design for advanced technologies. • Comprehensively summarizes many of the recent technical research accomplishments in the area of micro and nanostructured Interpenetrating Polymer Networks • Discusses various aspects of synthesis, characterization, structure, morphology, modelling, properties, and applications of IPNs • Describes how nano-structured IPNs correlate their multiscale structure to their properties and morphologies • Serves as a one-stop reference resource for important research accomplishments in the area of IPNs and nano-structured polymer systems • Includes chapters from leading researchers in the IPN field from industry, academy, government and private research institutions