MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials.

This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.

This book provides an overview of various drug delivery systems at the cellular level including biological, chemical methods, and most importantly physical methods such as photoporation, electroporation, mechanoporation, and device-based techniques (e.g., microfluidics), as well as organism-level techniques including nanomaterials, biomaterials, and transdermal. Drug delivery (DD) can be defined as the method and route by which an active pharmaceutical ingredient (API) is administered to promote its desired pharmacological effect and/or convenience and/or to reduce adverse effects. Drug delivery systems are developed to maximize drug efficacy and minimize side effects. As drug delivery technologies improve, the drug becomes safer and more comfortable for patients to use. During the last seven decades, extraordinary progress has been made in drug delivery technologies, such as systems for long-term delivery for months and years, localized delivery, and targeted delivery. The advances, however, will face the next phase considering the future technologies that we need to overcome many physicochemical barriers for new formulation development and biological unknowns for treating various diseases. Thus, various technologies are built at a single-cell level as well as an organism level. This book is useful at the university level for graduate courses or research studies and biotechnology-based companies with research and development on cell-based analysis, diagnosis, or drug screening. This book is also very useful for researchers in drug delivery technologies, which came in frontier research for the past decade.

This book discusses the recent research developments of various passive microwave circuits on silicon substrate and demonstrated operations catering for multiple frequency bands. It covers the design, modelling, process fabrication and characterization aspects with practical examples. The book will be of use to researchers and engineers working in the field of RF or microwave engineering, who can use the techniques and approaches effectively without having to refer to multiple sources.

Provides a comprehensive discussion of planar transmission lines and their applications, focusing on physical understanding, analytical approach, and circuit models Planar transmission lines form the core of the modern high-frequency communication, computer, and other related technology. This advanced text gives a complete overview of the technology and acts as a comprehensive tool for radio frequency (RF) engineers that reflects a linear discussion of the subject from fundamentals to more complex arguments. Introduction to Modern Planar Transmission Lines: Physical, Analytical, and Circuit Models Approach begins with a discussion of waves on transmission lines and waves in material medium, including a large number of illustrative examples from published results. After explaining the electrical properties of dielectric media, the book moves on to the details of various transmission lines including waveguide, microstrip line, co-planar waveguide, strip line, slot line, and coupled transmission lines. A number of special and advanced topics are discussed in later chapters, such as fabrication of planar transmission lines, static variational methods for planar transmission lines, multilayer planar transmission lines, spectral domain analysis, resonators, periodic lines and surfaces, and metamaterial realization and circuit models. Emphasizes modeling using physical concepts, circuit-models, closed-form expressions, and full derivation of a large number of expressions Explains advanced mathematical treatment, such as the variation method, conformal mapping method, and SDA Connects each section of the text with forward and backward cross-referencing to aid in personalized self-study Introduction to Modern Planar Transmission Lines is an ideal book for senior undergraduate and graduate students of the subject. It will also appeal to new researchers with the inter-disciplinary background, as well as to engineers and professionals in industries utilizing RF/microwave technologies.

Based on the success of the first edition, this second edition continues to build upon fundamental principles of biosensor design and incorporates recent advances in intelligent materials and novel fabrication techniques for a broad range of real world applications. The book provides a multi-disciplinary focus to capture the ever-expanding field of biosensors. Smart Biosensor Technology, Second Edition includes contributions from leading specialists in a wide variety of fields with a common focus on smart biosensor design. With 21 chapters organized in five parts, this compendium covers the fundamentals of smart biosensor technology, important issues related to material design and selection, principles of biosensor design and fabrication, advances in bioelectronics, and a look at specific applications related to pathogen detection, toxicity monitoring, microfluidics and healthcare. Features Provides a solid background in the underlying principles of biosensor design and breakthrough technologies for creating more intelligent biosensors Focusses on material design and selection including cutting-edge developments in carbon nanotubes, polymer nanowires, and porous silicon Examines machine learning and introduces concepts such as DNA-based molecular computing for smart biosensor function Explores the principles of bioelectronics and nerve cell microelectrode arrays for creating novel transducers and physiological biosensors Devotes several chapters to biosensors developed to detect and monitor a variety of toxins and pathogens Offers expert opinions on the future directions, challenges and opportunities in the field

This book gathers the Proceedings of the 8th International Conference on Robot Intelligence Technology and Applications (RITA 2020). The areas covered include: Instrumentation and Control, Automation, Autonomous Systems, Biomechatronics and Rehabilitation Engineering, Intelligent Systems, Machine Learning, Mobile Robotics, Social Robotics and Humanoid Robotics, Sensors and Actuators, and Machine Vision, as well as Signal and Image Processing. As a valuable asset, the book offers researchers and practitioners a timely overview of the latest advances in robot intelligence technology and its applications.

Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques of fabrication of MEMS structures. Wet chemical–based silicon bulk micromachining continues to be a widely used technique for the fabrication of microstructures used in MEMS devices. Researchers all over the world have contributed significantly to the advancement of wet chemical–based micromachining, from understanding the etching mechanism to exploring its application to the fabrication of simple to complex MEMS structures. In addition to its various benefits, one of the unique features of wet chemical–based bulk micromachining is the ability to fabricate slanted sidewalls, such as 45° walls as micromirrors, as well as freestanding structures, such as cantilevers and diaphragms. This makes wet bulk micromachining necessary for the fabrication of structures for myriad applications. This book provides a comprehensive understating of wet bulk micromachining for the fabrication of simple to advanced microstructures for various applications in MEMS. It includes introductory to advanced concepts and covers research on basic and advanced topics on wet chemical–based silicon bulk micromachining. The book thus serves as an introductory textbook for undergraduate- and graduate-level students of physics, chemistry, electrical and electronic engineering, materials science, and engineering, as well as a comprehensive reference for researchers working or aspiring to work in the area of MEMS and for engineers working in microfabrication technology.

The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. - Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field - Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms - Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy