A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.

Advanced Piezoelectric Materials: Science and Technology, Second Edition, provides revised, expanded, and updated content suitable for those researching piezoelectric materials or using them to develop new devices in areas such as microelectronics, optical, sound, structural, and biomedical engineering. Three new chapters cover multilayer technologies with base-metal internal electrodes, templated grain growth preparation techniques for manufacturing piezoelectric single crystals, and piezoelectric MEMS technologies. Chapters from the first edition have been revised in order to provide up-to-date, comprehensive coverage of developments in the field. Part One covers the structure and properties of a range of piezoelectric materials. Part Two details advanced manufacturing processes for particular materials and device types, including three new chapters. Finally, Part Three covers materials development for three key applications of piezoelectric materials. Dr. Kenji Uchino is a pioneer in piezoelectric actuators, Professor of Electrical Engineering at Penn State University, and Director of the International Center for Actuators and Transducers. He has authored 550 papers, 54 books and 26 patents in the ceramic actuator area. - Features an overview of manufacturing methods for a wide range of piezoelectric materials - Provides revised, expanded, and updated coverage compared to the first edition, including three new chapters - Suitable for those researching piezoelectric materials or using them to develop new devices in areas such as microelectronics, optical, sound, structural, and biomedical engineering

Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Mikro- und Nanotechnik haben Wissenschaft und Forschung revolutioniert. In Zukunft werden sie auch den Alltag verändern. Nun liegt der erste Band einer neuen Buchreihe vor: Advanced Micro and Nano Systems 1. Henry Baltes und seine Co-Autoren knüpfen mit AMN an die Sensors Update-Reihe an. Das Autorenteam wurde um weitere Experten erweitert. AMN wird zwei Mal pro Jahr mit einem neuen Band die aktuellen Entwicklungen in der Mikro- und Nano-Welt begleiten. Die Erforschung und der Einsatz von Mikro- und Nanosystemen sind eines der brandaktuellen Themen im Wissenschaftsbereich. Die Forschungsergebnisse werden mehr und mehr auch konkret umgesetzt. Damit werden Mikro- und Nanotechnologie zu Wirtschaftsfaktoren. Aktuelle Entwicklungen, neue Technologien, Nano-Bauelemente und Systeme im Mikromaßstab - Advanced Micro and Nano Systems, die neue Buchreihe, wird Spiegel der spannenden und faszinierenden Mikro- und Nano-Welt sein. Zweimal pro Jahr wird es einen neuen AMN-Band geben. Die Autoren sind ausgewiesene Spezialisten. Zu den Herausgebern zählt Henry Baltes, Professor an der ETH Zürich. Er zeichnete bereits für die Bände der Sensors Update-Reihe verantwortlich. Die Artikel ermöglichen Neueinsteigern einen ersten Zugriff auf die Materie. Fachleute erhalten einen umfassenden Überblick. Anspruch der Herausgeber ist es, nicht nur die theoretischen Grundlagen von Mikro- und Nanosystemen zu reflektieren, sondern immer auch praktische Möglichkeiten und die Grenzen der Anwendung im Blick zu haben. Die AMN-Bände sind Handbücher und Nachschlagewerke in einem. Die Reihe richtet sich an Vertreter unterschiedlicher Fachrichtungen: Biologie, Chemie, Mathematik, Sensorindustrie und Materialwissenschaften.

In Optical Nano and Micro Actuator Technology, leading engineers, material scientists, chemists, physicists, laser scientists, and manufacturing specialists offer an in-depth, wide-ranging look at the fundamental and unique characteristics of light-driven optical actuators. They discuss how light can initiate physical movement and control a variety of mechanisms that perform mechanical work at the micro- and nanoscale. The book begins with the scientific background necessary for understanding light-driven systems, discussing the nature of light and the interaction between light and NEMS/MEMS devices. It then covers innovative optical actuator technologies that have been developed for many applications. The book examines photoresponsive materials that enable the design of optically driven structures and mechanisms and describes specific light-driven technologies that permit the manipulation of micro- and nanoscale objects. It also explores applications in optofluidics, bioMEMS and biophotonics, medical device design, and micromachine control. Inspiring the next generation of scientists and engineers to advance light-driven technologies, this book gives readers a solid grounding in this emerging interdisciplinary area. It thoroughly explains the scientific language and fundamental principles, provides a holistic view of optical nano and micro actuator systems, and illustrates current and potential applications of light-driven systems.

Molecular Sensors and Nanodevices: Principles, Designs and Applications in Biomedical Engineering, Second Edition is designed to be used as a foundational text, aimed at graduates, advanced undergraduates, early-career engineers and clinicians. The book presents the essential principles of molecular sensors, including theories, fabrication techniques and reviews. In addition, important devices and recently, highly-cited research outcomes are also cited. This differentiates the book from other titles on the market whose primary focus is more research-oriented and aimed at more of a niche market. - Covers the fundamental principles of device engineering and molecular sensing, sensor theories and applications in biomedical science and engineering - Introduces nano/micro fabrication techniques, including MEMS, bioMEMS, microTAS and nanomaterials science that are essential in the miniaturization of versatile molecular sensors - Explores applications of nanomaterials and biomaterials, including proteins, DNAs, nanoparticles, quantum dots, nanotubes/wires and graphene in biomedicine

Composed of contributions from top experts, Microelectronics to Nanoelectronics: Materials, Devices and Manufacturability offers a detailed overview of important recent scientific and technological developments in the rapidly evolving nanoelectronics arena. Under the editorial guidance and technical expertise of noted materials scientist Anupama B. Kaul of California Institute of Technology’s Jet Propulsion Lab, this book captures the ascent of microelectronics into the nanoscale realm. It addresses a wide variety of important scientific and technological issues in nanoelectronics research and development. The book also showcases some key application areas of micro-electro-mechanical-systems (MEMS) that have reached the commercial realm. Capitalizing on Dr. Kaul’s considerable technical experience with micro- and nanotechnologies and her extensive research in prestigious academic and industrial labs, the book offers a fresh perspective on application-driven research in micro- and nanoelectronics, including MEMS. Chapters explore how rapid developments in this area are transitioning from the lab to the market, where new and exciting materials, devices, and manufacturing technologies are revolutionizing the electronics industry. Although many micro- and nanotechnologies still face major scientific and technological challenges and remain within the realm of academic research labs, rapid advances in this area have led to the recent emergence of new applications and markets. This handbook encapsulates that exciting recent progress by providing high-quality content contributed by international experts from academia, leading industrial institutions—such as Hewlett-Packard—and government laboratories including the U.S. Department of Energy’s Sandia National Laboratory. Offering something for everyone, from students to scientists to entrepreneurs, this book showcases the broad spectrum of cutting-edge technologies that show significant promise for electronics and related applications in which nanotechnology plays a key role.

Nanomaterials for Sensing and Optoelectronic Applications explores recent trends in nanomaterials and devices for chemical and biosensing applications. The synthesis, properties and applications of metal oxide nanostructures, as well as two-dimensional layered materials are covered, along with the fabrication of optoelectronic devices, such as chemical sensors, biosensors, core-shell nanostructures-based surface-enhanced Raman spectroscopy (SERS) substrates, luminescent nanoparticles, memory devices, and thin film transistors. Aiming at researchers in these respective areas, the fundamental principles and mechanisms of the optoelectronic phenomena behind every application mentioned are covered and comprehensively explored. The book will be helpful in solving problems related to the synthesis and growth of various nanostructures, the application of these materials for various devices, and to understand how a specific synthesis route promotes a specific application. - Outlines the fundamental principles and mechanisms behind chemical sensing, bio-sensing, thin film transistor devices, and memory devices - Offers a detailed description on the synthesis of 2D materials and oxide nanostructures, with thin films included - Assesses the major properties of nanomaterials that make them good sensing agents

Micro/Nano mechatronics is currently used in broader spectra, ranging from basic applications in robotics, actuators, sensors, semiconductors, automobiles, and machine tools. As a strategic technology highlighting the 21st century, this technology is extended to new applications in bio-medical systems and life science, construction machines, and aerospace equipment, welfare/human life engineering, and other brand new scopes. Basically, the miniaturizing technology is important to realize high performance, low energy consumption, low cost performance, small space instrumentation, light-weight, and so on. This book presents the summary of our project Center of Excellence for Education and Research of Micro-Nano Mechatronics. The project implements a strategy to realize applications of micro-nano mechatronics, which are based on mechanical engineering or materials science, control systems engineering, and advanced medical engineering. The chapters describe the research advances in micro/nano measurement and control, micro/nano design and manufacturing, nano materials science, and their applications in biomedical engineering. The publication of this book was supported by Nagoya University, the 21st COE program "Micro- and NanoMechatronics for Information-Based Society," and the global COE program “COE for Education and Research of Micro-Nano Mechatronics.”

Handbook of Nanomaterials for Intelligent Sensing Applications provides insights into the production of nanosensors and their applications. The book takes an interdisciplinary approach, showing how nano-enhanced sensing technology is being used in a variety of industry sectors and addressing related challenges surrounding the production, fabrication and application of nanomaterials-based sensors at both experimental and theoretical levels. This book is an important reference source for materials scientists and engineers who want to learn more about how nanomaterials are being used to enhance sensing products and devices for a variety of industry sectors. The pof miniaturized device components and engineering systems of micro- and nanoscale is beyond the capability of conventional machine tools. The production of intelligent sensors at nanometer scale presents great challenges to engineers in design and manufacture. The manufacturing of nano-scaled devices and components involves isolation, transportation and re-assembly of atoms and molecules. This nanomachining technology involves not only physical-chemical processes as in the case of microfabrication, but it also involves application and integration of the principles of molecular biology. - Explains how the functionalization of nanomaterials is being used to create more effective sensors - Explores the major challenges of using nanoscale sensors for industrial applications on a broad scale - Assesses which classes of nanomaterial should best be used for sensing applications